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Using the Electron Microscope to Explore Reliability in Microelectromechanical Systems and Nanostructured Materials

Published online by Cambridge University Press:  01 August 2004

E A Stach ,
Vidyut Gopal ,
Miao Jin ,
Daan Hein Alsem ,
Mark J. Williamson ,
Andrew Minor ,
Velimir R Radmilovic ,
Christopher L. Muhlstein ,
J. W. Morris  and
Robert O. Ritchie
E A Stach
Affiliation:
Lawrence Berkeley National Laboratory, California
Vidyut Gopal
Affiliation:
Lawrence Berkeley National Laboratory, California
Miao Jin
Affiliation:
Lawrence Berkeley National Laboratory, California
Daan Hein Alsem
Affiliation:
Lawrence Berkeley National Laboratory, California
Mark J. Williamson
Affiliation:
Lawrence Berkeley National Laboratory, California
Andrew Minor
Affiliation:
Lawrence Berkeley National Laboratory, California
Velimir R Radmilovic
Affiliation:
Lawrence Berkeley National Laboratory, California
Christopher L. Muhlstein
Affiliation:
Pennsylvania State University
J. W. Morris
Affiliation:
Lawrence Berkeley National Laboratory, California
Robert O. Ritchie
Affiliation:
Lawrence Berkeley National Laboratory, California
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 354 - 355
Copyright
© 2004 Microscopy Society of America

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Using the Electron Microscope to Explore Reliability in Microelectromechanical Systems and Nanostructured Materials
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