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Ultrahigh-Vacuum Third-Order Spherical Aberration (Cs) Corrector for a Scanning Transmission Electron Microscope

Published online by Cambridge University Press:  11 October 2006

Kazutaka Mitsuishi
Affiliation:
High-Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
Masaki Takeguchi
Affiliation:
High-Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
Yukihito Kondo
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Fumio Hosokawa
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Kimiharu Okamoto
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Takumi Sannomiya
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Madoka Hori
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Takeshi Iwama
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Muneyuki Kawazoe
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
Kazuo Furuya
Affiliation:
High-Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan

Abstract

Initial results from an ultrahigh-vacuum (UHV) third-order spherical aberration (Cs) corrector for a dedicated scanning transmission electron microscopy, installed at the National Institute for Materials Science, Tsukuba, Japan, are presented here. The Cs corrector is of the dual hexapole type. It is UHV compatible and was installed on a UHV column. The Ronchigram obtained showed an extension of the sweet spot area, indicating a successful correction of the third-order spherical aberration Cs. The power spectrum of an image demonstrated that the resolution achieved was 0.1 nm. A first trial of the direct measurement of the fifth-order spherical aberration C5 was also attempted on the basis of a Ronchigram fringe measurement.

Type
Research Article
Copyright
© 2006 Microscopy Society of America

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Ultrahigh-Vacuum Third-Order Spherical Aberration (Cs) Corrector for a Scanning Transmission Electron Microscope
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