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Surface Versus Bulk Defects on Devices using Complementary Techniques

Published online by Cambridge University Press:  03 August 2008

VS Smentkowski
Affiliation:
General Electric Global Research
SG Ostrowski
Affiliation:
General Electric Global Research
L Denault
Affiliation:
General Electric Global Research
CG Woychik
Affiliation:
General Electric Global Research
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

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