Skip to main content Accessibility help
×
Home
Hostname: page-component-559fc8cf4f-s65px Total loading time: 0.425 Render date: 2021-03-07T07:10:29.286Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction

Published online by Cambridge University Press:  10 August 2016

Brian E. Jackson
Affiliation:
Mechanical Engineering Department, Brigham Young University, Provo, UT 84602, USA
Jordan J. Christensen
Affiliation:
Mechanical Engineering Department, Brigham Young University, Provo, UT 84602, USA
Saransh Singh
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA
Marc De Graef
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA
David T. Fullwood
Affiliation:
Mechanical Engineering Department, Brigham Young University, Provo, UT 84602, USA
Eric R. Homer
Affiliation:
Mechanical Engineering Department, Brigham Young University, Provo, UT 84602, USA
Robert H. Wagoner
Affiliation:
Department of Material Science and Engineering, Ohio State University, 2041 College Rd, Columbus, OH 43210, USA
Corresponding
E-mail address:

Abstract

High-resolution (or “cross-correlation”) electron backscatter diffraction analysis (HR-EBSD) utilizes cross-correlation techniques to determine relative orientation and distortion of an experimental electron backscatter diffraction pattern with respect to a reference pattern. The integrity of absolute strain and tetragonality measurements of a standard Si/SiGe material have previously been analyzed using reference patterns produced by kinematical simulation. Although the results were promising, the noise levels were significantly higher for kinematically produced patterns, compared with real patterns taken from the Si region of the sample. This paper applies HR-EBSD techniques to analyze lattice distortion in an Si/SiGe sample, using recently developed dynamically simulated patterns. The results are compared with those from experimental and kinematically simulated patterns. Dynamical patterns provide significantly more precision than kinematical patterns. Dynamical patterns also provide better estimates of tetragonality at low levels of distortion relative to the reference pattern; kinematical patterns can perform better at large values of relative tetragonality due to the ability to rapidly generate patterns relating to a distorted lattice. A library of dynamically generated patterns with different lattice parameters might be used to achieve a similar advantage. The convergence of the cross-correlation approach is also assessed for the different reference pattern types.

Type
Technique and Instrumentation Development
Copyright
© Microscopy Society of America 2016 

Access options

Get access to the full version of this content by using one of the access options below.

References

Alkorta, J. (2013). Limits of simulation based high resolution EBSD. Ultramicroscopy 131, 3338.CrossRefGoogle ScholarPubMed
Basinger, J., Fullwood, D., Kacher, J. & Adams, B. (2011). Pattern center determination in EBSD microscopy. Microsc Microanal 17, 330340.CrossRefGoogle ScholarPubMed
Biggin, S. & Dingley, D. (1977). A general method for locating the X-ray source point for Kossel diffraction. J Appl Crystallogr 10, 376385.CrossRefGoogle Scholar
Brigham Young University (2015). OpenXY. Available at https://github.com/byu-microstructureofmaterials/openxy (retrieved May 17, 2015).Google Scholar
Britton, T., Maurice, C., Fortunier, R., Driver, J., Day, A., Meaden, G., Dingley, D., Mingard, K. & Wilkinson, A. (2010). Factors affecting the accuracy of high resolution electron backscatter diffraction when using simulated patterns. Ultramicroscopy 110, 14431453.CrossRefGoogle ScholarPubMed
Britton, T. & Wilkinson, A.J. (2012). High resolution electron backscatter diffraction measurements of elastic strain variations in the presence of larger lattice rotations. Ultramicroscopy 114, 8295.CrossRefGoogle ScholarPubMed
Callahan, P. & De Graef, M. (2013). Dynamical EBSD patterns part I: Pattern simulations. Microsc Microanal 19, 12551265.CrossRefGoogle ScholarPubMed
Deal, A., Hooghan, T. & Eades, A. (2008). Energy-filtered electron backscatter diffraction. Ultramicroscopy 108, 116125.CrossRefGoogle ScholarPubMed
De Graef, M. (2015). Emsoft 3.0. Available at http://www.github.com/marcdegraef/emsoft (retrieved December 12, 2015).Google Scholar
Fullwood, D., Vaudin, M., Danies, C., Ruggles, T. & Wright, S. (2015). Validation of kinematically simulated pattern HR-EBSD for measuring absolute strains and lattice tetragonality. Mater Charact 107, 270277.CrossRefGoogle Scholar
Gardner, C.J., Adams, B.L., Basinger, J. & Fullwood, D.T. (2010). EBSD-based continuum dislocation microscopy. Int J Plasticity 26, 12341247.CrossRefGoogle Scholar
The HDF Group (2014). http://www.hdfgroup.org/ (retrieved December 12, 2015).Google Scholar
Humphreys, C. (1979). The scattering of fast electrons by crystals. Rep Prog Phys 42, 18251887.CrossRefGoogle Scholar
Joy, D. (1995). Monte Carlo Modeling for Electron Microscopy and Microanalysis. USA: Oxford University Press.Google Scholar
Kacher, J., Basinger, J., Adams, B.L. & Fullwood, D.T. (2010). Reply to comment by Maurice et al. in response to “Bragg’s law diffraction simulations for electron backscatter diffraction analysis”. Ultramicroscopy 110, 760762.CrossRefGoogle Scholar
Kacher, J., Landon, C., Adams, B.L. & Fullwood, D. (2009). Bragg’s law diffraction simulations for electron backscatter diffraction analysis. Ultramicroscopy 109, 11481156.CrossRefGoogle ScholarPubMed
Landon, C., Adams, B. & Kacher, J. (2008). High resolution methods of characterizing mesoscale dislocation structures. J Eng Mater Technol 130, 021004021008.CrossRefGoogle Scholar
Maurice, C., Dzieciol, K. & Fortunier, R. (2011). A method for accurate localisation of EBSD pattern centres. Ultramicroscopy 111, 140148.CrossRefGoogle ScholarPubMed
Maurice, C., Fortunier, R., Driver, J., Day, A., Mingard, K. & Meaden, G. (2010). Comments on the paper “Bragg’s law diffraction simulations for electron backscatter diffraction analysis” by Josh Kacher, Colin Landon, Brent L. Adams and David Fullwood. Ultramicroscopy 110, 758759.CrossRefGoogle Scholar
Mingard, K.P., Day, A.P. & Quested, P.N. (2014). Recent developments in two fundamental aspects of electron backscatter diffraction. IOP Conf Ser Mater Sci Eng 55, 012011.CrossRefGoogle Scholar
Rice, K., Keller, R. & Stykovich, M. (2014). Specimen-thickness effects on transmission Kikuchi patterns in the scanning electron microscope. Microscopy 254, 129136.CrossRefGoogle ScholarPubMed
Roşca, D. & De Graef, M. (2013). Area-preserving projections from hexagonal and triangular domains to the sphere and applications to electron back-scatter diffraction pattern simulations. Model Simulation Mater Sci Eng 21, 055021.CrossRefGoogle Scholar
Roşca, D., Morawiec, A. & De Graef, M. (2014). A new method of constructing a grid in the space of 3D rotations and its applications to texture analysis. Model Simulation Mater Sci Eng 22, 075013.CrossRefGoogle Scholar
Ruggles, T. & Fullwood, D. (2013). Estimation of bulk dislocation density based on known distortion gradients recovered from EBSD. Ultramicroscopy 133, 815.CrossRefGoogle Scholar
Schwartz, A.J., Kumar, M., Adams, B.L. & Field, D.P. (2009). Electron Backscatter Diffraction in Material Science. New York: Springer.CrossRefGoogle Scholar
Troost, K., Sluis, P. & Gravesteijn, D. (1993). Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope. Appl Phys Lett 62, 11101112.CrossRefGoogle Scholar
Vaudin, M., Osborn, W., Friedman, L., Gorham, J., Vartanian, V. & Cook, R. (2015). Designing a standard for strain mapping: HR-EBSD analysis of SiGe thin film structures on Si. Ultramicroscopy 148, 94104.CrossRefGoogle Scholar
Villert, S., Maurice, C., Wyon, C. & Fortunier, R. (2009). Accuracy assessment of elastic strain measurement by EBSD. J Microsc 233, 290301.CrossRefGoogle ScholarPubMed
Wilkinson, A.J., Meaden, G. & Dingley, D.J. (2006). High-resolution elastic strain measurement from electron backscatter diffraction patterns: New levels of sensitivity. Ultramicroscopy 106, 301313.CrossRefGoogle Scholar
Wilkinson, A.J. & Randman, D. (2010). Determination of elastic strain fields and geometrically necessary dislocation distributions near nanoindents using electron backscatter diffraction. Philos Mag 90, 11591177.CrossRefGoogle Scholar
Winkelmann, A. (2010). Principles of depth-resolved Kikuchi pattern simulation for electron backscatter diffraction. J Microsc 239, 3245.CrossRefGoogle ScholarPubMed
Winkelmann, A., Nolze, G., Vos, M., Salvat-Pujol, F. & Werner, W. (2016). Physics-based simulation models for EBSD: Advances and Challenges, IOP Conference Series: Material Science and Engineering, vol. 109.Google Scholar
Winkelmann, A., Trager-Cowan, C., Sweeney, F., Day, A.P. & Parbook, P. (2007). Many-beam dynamical simulation of electron backscatter diffraction patterns. Ultramicroscopy 107, 414421.CrossRefGoogle ScholarPubMed
Wright, S. (1993). A review of automated orientation imaging microscopy (OIM). J Comput Assist Microsc 5, 207.Google Scholar
Wright, S. & Nowell, M. (2008). High-speed EBSD. Adv Mater Processes 166, 2931.Google Scholar
Wright, S., Nowell, M. & Basinger, J. (2011). Precision of EBSD based orientation measurements. Microsc Microanal 17, 406407.CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 37
Total number of PDF views: 233 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 7th March 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Performance of Dynamically Simulated Reference Patterns for Cross-Correlation Electron Backscatter Diffraction
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *