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Atom Scale Characterization of the Near Apex Region of an Atomic Force Microscope Tip

Published online by Cambridge University Press:  30 July 2010

Christopher J. Tourek
Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA
Sriram Sundararajan
Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA
E-mail address:


Three-dimensional atom probe tomography (APT) is successfully used to analyze the near-apex regions of an atomic force microscope (AFM) tip. Atom scale material structure and chemistry from APT analysis for standard silicon AFM tips and silicon AFM tips coated with a thin film of Cu is presented. Comparison of the thin film data with that observed using transmission electron microscopy indicates that APT can be reliably used to investigate the material structure and chemistry of the apex of an AFM tip at near atomic scales.

Atomic Force and Atom Probe Applications
Copyright © Microscopy Society of America 2010

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