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3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

  • Matthew J. Burch (a1), Anton Ievlev (a1), Songkil Kim (a1), Alex Belianinov (a1) (a2), Olga S. Ovchinnikova (a1) (a2), Michael G. Stanford (a3), Kyle Mahady (a3), Brett B. Lewis (a3), Jason D. Fowlkes (a1) (a3) and Philip D. Rack (a1) (a3)...
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[1] Lipp, S., et al, Microelectronics Reliability 36 1996) p. 1779.
[2] Utke, I., Moshkalev, S. Russell, P. Nanofabrication using focused ion and electron beams: principles and applications. Oxford University Press 2012.
[3] Van Dorp, W. Hagen, C. W. Journal of Applied Physics 104 2008) p. 10.
[4] Fowlkes, J. D., et al, ACS nano 10 2016) p. 6163.
[5] Belianinov, A., et al, MRS Bulletin 42 2017) p. 660.
[6] Hlawacek, G. Golzhauser, A. eds Helium Ion Microscopy. Cham: Springer International Publishing 2016.
[7] The HIM imaging, image analytics and simulations portion of this research was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. This research was funded by the Center for Nanophase Materials Sciences, which is a U. S. Department of Energy Office of Science User Facility.

3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

  • Matthew J. Burch (a1), Anton Ievlev (a1), Songkil Kim (a1), Alex Belianinov (a1) (a2), Olga S. Ovchinnikova (a1) (a2), Michael G. Stanford (a3), Kyle Mahady (a3), Brett B. Lewis (a3), Jason D. Fowlkes (a1) (a3) and Philip D. Rack (a1) (a3)...

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