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20th Anniversary of Evactron® Plasma Cleaners for SEMs and FIBs

Published online by Cambridge University Press:  05 August 2019

Ronald Vane ,
Barbara Armbruster ,
Michael Cable ,
Ewa Kosmowska  and
George Safar
Ronald Vane*
Affiliation:
XEI Scientific, Inc., Redwood City, CA, USA.
Barbara Armbruster
Affiliation:
XEI Scientific, Inc., Redwood City, CA, USA.
Michael Cable
Affiliation:
XEI Scientific, Inc., Redwood City, CA, USA.
Ewa Kosmowska
Affiliation:
XEI Scientific, Inc., Redwood City, CA, USA.
George Safar
Affiliation:
XEI Scientific, Inc., Redwood City, CA, USA.
*
*Corresponding author: rvane@evactron.com

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 550 - 551
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Vane, R, US Patents 6,105,589 (issued Aug. 2000) and 6,452,315 (issued Sept. 2002).Google Scholar
[2]Vladár, AE et al. , Proc. SPIE 4344 (2001), p. 835.Google Scholar
[3]Kosmowska, E et al. , Microsc. Microanal. 23 (S1) (2017), p. 74.Google Scholar
[4]Morgan, CG, Gleason, MM and Vane, R, Microsc. Microanal. 13 (2) (2007), p. 1736.Google Scholar