Skip to main content Accessibility help
×
Home

X-ray diffraction study of thin film elasticity constants

  • P. Villain, P.-O. Renault, P. Goudeau and K. E. Badawi

Abstract

We have developed an original method allowing to determine the elasticity constants of thin crystalline films deposited on substrates, which combines X-ray diffraction and in situ tensile testing. This technique has been successfully applied to measure the Poisson's ratio in tungsten thin films (150 nm) and molybdenum sublayers (8 nm) of a Mo/Ni multilayer. This paper gives the principles and experimental requirements for the Young's modulus determination.

Copyright

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed