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The Nature and Impact of ZnO Buffer Layers on the Initial Stages of the Hydride Vapor Phase Epitaxy of GAN

  • Shulin Gu, Rong Zhang, Jingxi Sun, Ling Zhang and T. F. Kuech...

Abstract

The nature and impact of ZnO buffer layers on the initial stages of the hydride vapor phase epitaxy (HVPE) of GaN have been studied by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), x-ray diffraction (XRD) and photoluminescence (PL). During pre-growth heating, the surface ZnO layer was found to both desorb from ZnO-coated sapphire and react with the underlying sapphire surface forming a thin ZnAl2O4 alloy layer between ZnO and sapphire surface. This ZnO-derived surface promotes the initial nucleation of the GaN and markedly improves material surface morphology, quality and growth reproducibility.

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References

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[1] Detchprohm, T., Hiramatsu, K., Amano, H., and Akasaki, I., Appl. Phys. Lett., 61, 2688(1992).
[2] Molnar, R. J., Nichols, K. B., Maki, P., Brown, E. R., and Melngailis, I., Mater. Res. Soc. Symp. Proc., 378, 479 (1995).
[3] Nakamura, S., Jpn. J. Appl. Phys., 30, L1705 (1991).
[4] Akasaki, I., and Amano, H., J. Crystal Growth, 163, 86 (1996).
[5] Monlar, R. J., Gotz, W., Romano, L. T., and Johnson, J. M., J. Crystal Growth, 178, 147 (1997).
[6] Ueda, T., Huang, T. F., Spruytte, S., Lee, H., Yuri, M., Itoh, K., Baba, T., and Harris, J. S. Jr, J. Crystal Growth, 187, 340 (1998).
[7] Keller, J. T., Agrawal, D. K., and Mckinstry, H. A., Advanced Ceramic Materials, 3(4), 420 (1988).
[8] Sampath, S. K., and Cordaro, J. F., J. Am. Ceram. Soc., 81(3), 649 (1998).
[9] Branson, D. L., J. Am. Ceram. Soc., 48(11), 591 (1965).
[10] Perkins, N. R., Horton, M. N., Bandic, Z. Z., McGill, T. C., and Kuech, T. F., Mat. Res. Soc. Symp. Proc., 395, 243 (1996).
[11] Zhang, R., and Kuech, T. F., Mat. Res. Soc. Symp. Proc., 482, 709 (1998).
[12] Strohmeier, B. R., Surface Science Spectra, 3(2), 128 (1995).

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The Nature and Impact of ZnO Buffer Layers on the Initial Stages of the Hydride Vapor Phase Epitaxy of GAN

  • Shulin Gu, Rong Zhang, Jingxi Sun, Ling Zhang and T. F. Kuech...

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