Skip to main content Accessibility help
×
Home

Formation of BN and AlBN During Nitridation of Sapphire Using RF Plasma Sources

  • A.J. Ptak (a1), K.S. Ziemer (a2), L.J. Holbert (a1), C.D. Stinespring (a2) and T.H. Myers (a1) (a3)...

Abstract

Evidence is presented that nitrogen plasma sources utilizing a pyrolytic boron nitride liner may be a significant source of B contamination during growth and processing. Auger electron spectroscopy analysis performed during nitridation of sapphire indicate the resulting layers contain a significant amount of BN. The formation of Al1-xBxN would explain the observation of a lattice constant several percent smaller than AlN as measured by reflection high-energy electron diffraction. The presence of cubic inclusions in layers grown on such a surface may be related to the segregation of BN during the nitridation into its cubic phase.

  • View HTML
    • Send article to Kindle

      To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

      Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

      Find out more about the Kindle Personal Document Service.

      Formation of BN and AlBN During Nitridation of Sapphire Using RF Plasma Sources
      Available formats
      ×

      Send article to Dropbox

      To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

      Formation of BN and AlBN During Nitridation of Sapphire Using RF Plasma Sources
      Available formats
      ×

      Send article to Google Drive

      To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

      Formation of BN and AlBN During Nitridation of Sapphire Using RF Plasma Sources
      Available formats
      ×

Copyright

References

Hide All
1 Grandjean, N., Massies, J. and Leroux, L., Appl. Phys. Lett. 69, 2071 (1996).
2 Yang, Z., Li, L.K., and Wang, W.I., J. Vac. Sci. Technol. B14, 2354 (1996).
3 Moustakas, T.D., Molnar, R.J., Lei, T., Menon, G. and Eddy, J.C.R., Mater. Res. Symp. Proc. 242, 427 (1992).
4 Heinlein, C., Grepstad, J., Berge, T. and Riechert, H., Appl. Phys. Lett. 71, 341 (1997).
5 Ptak, A.J., Ziemer, K.S., Millecchia, M.R., Stinespring, C.D., and Myers, T.H., MRS Internet J. Nitride Semicond. Res. 4S1, G3.10 (1999).
6 Widmann, F., Feuillet, G., Daudin, B. and Rouviere, J.L., J. Appl. Phys. 85, 1550 (1999)
7 Yeadon, M., Marshall, M.T., Hamdani, F., Pekin, S., Morkoç, H., and Gibson, J.M., J. Appl. Phys. 83, 2847 (1998).
8 Ptak, A.J., Millecchia, M.R., Myers, T.H., Ziemer, K.S. and Stinespring, C.D., Appl. Phys. Lett. 74, 3836 (1999).
9 Myers, T.H., Millecchia, M.R., Ptak, A.J., Ziemer, K.S. and Stinespring, C.D., J. Vac. Sci. Technol. B17, 1654 (1999).
10 Moldovan, M., Hirsch, L.S., Ptak, A.J., Stinespring, C.D., Myers, T.H. and Giles, N.C., J. Electron. Mater. 27, 756 (1998).
11 Polyakov, A.Y., Shin, M., Qian, W., Skowronski, M., Greve, D.W. and Wilson, R.G., J. Appl. Phys 81, 1715 (1997).

Formation of BN and AlBN During Nitridation of Sapphire Using RF Plasma Sources

  • A.J. Ptak (a1), K.S. Ziemer (a2), L.J. Holbert (a1), C.D. Stinespring (a2) and T.H. Myers (a1) (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed