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Electron Beam Bombardment Induced Decrease of Cathodoluminescence Intensity from GaN Not Caused by Absorption in Buildup of Carbon Contamination

  • Eva M. Campo (a1), G. S. Cargill III (a1), Milan Pophristic (a2) and Ian Ferguson (a3)

Abstract

Monochromatic CL imaging, CL spectra, WDS spectra, and EDS spectra and imaging demonstrate that electron beam bombardment of LEO-GaN causes decrease of near band edge cathodoluminescence intensity that cannot be attributed to absorption in a growing carbon contamination layer. An alternative explanation is needed, such as generation of defects, or charge injection and buildup of internal electric fields, caused by electron beam bombardment.

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