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One-dimensional computation of discharge-pumped excimer lasers under repetitive operations

  • K. Kasuya (a1), K. Horioka (a1), N. Hikida (a1), M. Watanabe (a1), Y. Kawakita (a2), S. Kato (a2) and H. Okuda (a3)...

Abstract

Zero-dimensional numerical computation of electrical discharge-pumped excimer lasers is extended to a one-dimensional model that is used to study the effects of the density perturbations of the background neutral gas and the nonuniform predischarge (which means preionization in this paper) electron density on the transition of the uniform discharge to the nonuniform prestage state leading to the onset of arc formation (which is not included in this particular model). It was found that a local density depression of 1% or an enhancement of the local electric field of 1% can increase the local energy input by several hundred percent. The initial electron density perturbations, on the other hand, are found to modify the energy input by the same order of magnitude as the initial perturbations.

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One-dimensional computation of discharge-pumped excimer lasers under repetitive operations

  • K. Kasuya (a1), K. Horioka (a1), N. Hikida (a1), M. Watanabe (a1), Y. Kawakita (a2), S. Kato (a2) and H. Okuda (a3)...

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