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Nano-structured lithium-tin plane fabrication for laser produced plasma and extreme ultraviolet generation

  • Keiji Nagai (a1), Q. Gu (a1), T. Norimatsu (a1), S. Fujioka (a1), H. Nishimura (a1), N. Miyanaga (a1), K. Nishihara (a1), Y. Izawa (a1) and K. Mima (a1)...

Abstract

This paper deals with a lithium/tin combined target to increase the conversion efficiency of extreme ultraviolet (EUV) of 13.5 nm emission from laser-produced plasma. The bilayer target of glass/lithium (20 nm)/tin (50 nm) exhibits a sharp and strong emission in comparison with a Sn bulk target. The reverse coating of glass/tin/lithium was unstable and EUV could not be observed. By using nano-porous SnO2 and an electrochemical deposition of lithium, nano-structured lithium/tin composite was prepared, and was stable without deliquescence of lithium.

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Corresponding author

Address correspondence and reprint requests to: Keiji Nagai, Institute of Laser Engineering, Osaka University, Yamada Oka 2-6, Suita, Osaka, Japan. E-mail: knagai@ile.osaka-u.ac.jp

References

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