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In-situ diagnostics of hydrocarbon dusty plasmas using quantum cascade laser absorption spectroscopy and mass spectrometry

  • K. Ouaras (a1), L. Colina Delacqua (a1), G. Lombardi (a1), J. Röpcke (a2), M. Wartel (a1) (a3), X. Bonnin (a1), M. Redolfi (a1) and K. Hassouni (a1)...


The formation of carbon nanoparticles in low pressure magnetized H2/CH4 and H2/C2H2 plasmas is investigated using infrared quantum cascade laser absorption, mass spectrometry, and electrostatic probe measurements. Results showed that dust formation is correlated to the presence of a significant amount of large positively charged hydrocarbon ions. Large negative ions or neutral hydrocarbon were not observed. These results, along with a qualitative comparison of diffusion and reaction characteristic, suggest that a positive ion may contribute to the growth of nanoparticles in hydrocarbon magnetized plasmas.


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