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Micro-System Displacement and Profile Measurement By an Integrated Photon Tunneling and Confocal Microscope

  • Wen-Jong Chen (a1), Chih-Kung Lee (a2), Shui-Shong Lu (a1), Long-Sun Huang (a2), Ta-Shun Chu (a2), Ying-Chou Cheng (a1) and Wu-Fone Yeh (a2)...


An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.


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*Ph.D. student
***Assistant Professor
****Graduate student


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1Chu, W. H., Mehregany, M. and Mullen, B. H., “Analysis of tip deflection and force a bimetallic microactuator,” J. Micromech. Microeng., 3, pp. 47 (1993).
2Chung, S. W. and Kim, Y. K., “Design and fabrication of 10 × 10 micro-apatial light modulator array for phase and amplitude modulation,” Sens. Actuators A, 78(1), pp. 6370 (1999).
3Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J. P. and Solgaard, O., “Dual-mode micromirrors for optical phased array applications,” Sens. Actuators A, 97–98, pp. 2126 (2002).
4Buhler, J., Funk, J., Korvink, J. G., Steiner, F. P., Sarro, P. M. and Baltes, H., “A silicon resonant sensor structure for Coriolis mass-flow measurements,” J. Microelectromech. Syst., 6(2), pp. 126135 (1997).
5Zavracky, P. M., Majumber, S. and McGrruer, E., “Micromechanical switches fabricated using nickel surface micromachining,” J. Microelectromech. Syst., 6(1), pp. 39 (1997).
6Strozewski, K. J., Wang, C. Y., Wetsel, G. C. Jr., Boysel, R. M. Jr. and Florence, J. M. Jr., “Optical power induced damage to microelectromechanical mirrors,” J. Appl. Phys., 73, pp. 71257128 (1993).
7Chung, S. W., Shin, J. W., Kim, Y. K. and Han, B. S., “Design and fabrication of micromirror supported by electroplated nickel posts,” Sens. Actuators A, 54(1-3), pp. 464467 (1996).
8Min, Y.-H. and Kim, Y.-K., “Modeling, design, fabrication and measurement of a single layer polysilicon micro-mirror with initial curvature compensation,” Sens. Actuators A, 78(1), pp. 817 (1999).
9Fischer, M., Giousouf, M., Schaepperle, J., Eichner, D., Weinmann, M., von Munch, W. and Assmus, F., “Electrostatically deflectable polysilicon micromirrors-dynamic behaviour and comparison with the results from FEM modeling with ANSYS,” Sens. Actuators A, 67(1-3), pp. 8995 (1998).
10Degani, O., Socher, E., Lipson, A., Leitner, T., Setter, D. J., Kaldor, S. and Nemirovsky, Y., “Pull-in study of an electrostatic torsion microactuator,” J. Microelectromech. Syst., 7(4), pp. 373379 (1998).
11Shin, J. W., Chung, S. W., Kim, Y. K. and Choi, B. K., “Silicon mirror arrays fabricated by using bulk- and surface micromachining,” Sens. Actuators A, 66(1-3), pp. 144149 (1998).
12Guerra, J. M., “Photon tunneling microscopy,” Applied Optics, 29(26), pp. 37413752 (1990).
13Wilson, T. and Sheppard, C. J. R., Theory and Practice of Scanning Optical Microscopy, Academic Press, London, UK (1984).
14Fang, W. and Wickert, J. A., “Determining mean and gradient residual stresses in thin films using micromachined cantilevers,” J. Micromech. Microeng., 6, pp. 301309 (1996).
15Fang, W. and Wickert, J. A., “Comments on measuring thin-film stresses using bilayer micromachined beams,” J. Micromech. Microeng., 5, pp. 276281(1995).
16Chu, T. C., Ranson, W. F., Sutton, M. A. and Peters, W. H., “Applications of digital image-correlation techniques to experimental mechanics,” Experimental Mechanics, 25(3), pp. 232244 (1985).
17Meng, Q., Mehregany, M. and Mullen, R. L., “Theoretical modeling of microfabricated beams with elastically restrained supports,” J. Micro-electromechanical System, 2(2), pp. 128137 (1993).
18Cheng, D. K., Field and Wave Electromagnetics, Addison Wesley, Longman, CO, USA (1996).
19Timoshenko, S. P. and Goodier, J. N., Theory of Elasticity, 3rd ed., McGraw-Hill, New York, New York, USA (1970).


Micro-System Displacement and Profile Measurement By an Integrated Photon Tunneling and Confocal Microscope

  • Wen-Jong Chen (a1), Chih-Kung Lee (a2), Shui-Shong Lu (a1), Long-Sun Huang (a2), Ta-Shun Chu (a2), Ying-Chou Cheng (a1) and Wu-Fone Yeh (a2)...


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