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Numerical Investigation of Rayleigh, Sezawa and Love Modes in C-Axis Tilted ZNO/SI for Gas and Liquid Multimode Sensor

Published online by Cambridge University Press:  14 November 2019

F. Laidoudi
Affiliation:
Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, (USTHB).Research Center in Industrial Technologies CRTI, P.O.Box64 Cheraga 16014 Algiers, Algeria
F. Boubenider
Affiliation:
Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, (USTHB). Algiers, Algeria
C. Caliendo
Affiliation:
Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
M. Hamidullah
Affiliation:
Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
Corresponding
E-mail address:
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Abstract

Finite element analysis is carried out to investigate the characteristics of Rayleigh, Sezawa and Love surface acoustic modes travelling along c-axis tilted ZnO layer on Si (001) half-space. The phase velocity dispersion curves, electromechanical coupling, reflectivity and mass loading sensitivity are studied for different electroacoustic coupling configurations and c-axis tilt angles θ. The behavior of Rayleigh and Sezawa modes operating as gas sensor, was simulated under the hypothesis that the ZnO free surface is covered with a thin polyisobutylene (PIB) film, 0.2 μm thick, able to selectively adsorb volatile gases at atmospheric pressure and room temperature. The sensor sensitivity to gas concentration in air, i.e. the frequency shifts per unit gas concentration, is studied and compared to some common materials used in literature. The obtained results, demonstrate the feasibility of high-frequency multimode micro-sensor based on the c-axis tilted ZnO piezoelectric thin film and operating in both liquid and gaseous environments.

Type
Research Article
Copyright
Copyright © 2019 The Society of Theoretical and Applied Mechanics 

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Numerical Investigation of Rayleigh, Sezawa and Love Modes in C-Axis Tilted ZNO/SI for Gas and Liquid Multimode Sensor
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