Skip to main content Accessibility help
×
Home

Uniformity and interfaces in ion-beam deposited Al/Ni multilayers

  • A. S. Edelstein (a1), R. K. Everett (a1), J. H. Perepezko (a2) and M. H. da Silva Bassani (a2)

Abstract

The uniformity and reaction kinetics of ion-beam deposited Al/Ni multilayer samples with the same composition, Al81.8Ni18.2, and modulation wavelength, Λ = 20 nm, but with different total film thicknesses were investigated by x-ray diffraction and differential scanning calorimetry measurements. The total film thicknesses varied between approximately 0.5 and 2.0 μm. It was found that the interface widths were approximately 1 nm and the Ni layers are much more disordered than the Al layers. The thicker samples show an increase in disorder on a length scale comparable to Λ. In other experiments, a change was observed with increasing modulation wavelength from semicoherent interfaces with a low density of misfit dislocations to semicoherent interfaces with a high density of misfit dislocations. The reaction kinetics for forming the Al9Ni2 phase is independent of the sample thickness.

Copyright

References

Hide All
1.Colgan, E. G., Mater. Sci. Rep. 5, 1 (1990).
2.Colgan, E. G., Nastasi, M., and Mayer, J. W., J. Appl. Phys. 58, 4125 (1985).
3.Miracle, D. B., Acta Metall. Mater. 41 (3), 649 (1993).
4.Edelstein, A. S., Everett, R. K., Richardson, G. R., Quadri, S. B., Altman, E. I., Foley, J. S., and Perepezko, J. H., J. Appl. Phys. 76, 7850 (1994).
5.Edelstein, A. S., Everett, R. K., Richardson, G. R., Quadri, S. B., Foley, J. S., and Perepezko, J. H., Mater. Sci. Eng. A 195, 13 (1995).
6.Ma, E., Thompson, C. V., and Clevenger, L. A., J. Appl. Phys. 69 (4), 2211 (1991).
7.Chaudhuri, J., Gondhalekar, V., and Jankowski, A. F., J. Appl. Phys. 71, 3816 (1922).
8.Gilles, B. and Marty, A., in Thin Films: Stresses and Mechanical Properties, edited by Baker, S. P., Børgesen, P., Townsend, P. H., Ross, C. A., and Volkert, C. A. (Mater. Res. Soc. Symp. Proc. 356, Pittsburgh, PA, 1995), p. 379.
9.Jongste, J. F., Alkemade, P. F. A., Janssen, G. C. A. M., and Radelaar, S., J. Appl. Phys. 74, 3869 (1993).
10.Frank, F. C. and van der Merwe, J. H., Proc. R. Soc. London A 198, 216 (1949).
11.van der Merwe, J. H., J. Appl. Phys. 34, 117 (1963).
12.van der Merwe, J. H., Single Crystal Films (Pergamon, New York, 1964).
13.Mathews, J. W. and Blakeslee, A. E., J. Cryst. Growth 27, 118 (1974).
14.Prokes, S. M. and Spaepen, F., Appl. Phys. Lett. 47, 234 (1985).
15.Underwood, J. H. and Barbee, T. W., Jr., Appl. Optics 20, 3027 (1981).
16.Yamane, H., Maeno, Y., and Kobayashi, M., Mater. Trans., JIM 36, 705 (1995).
17.Michaelsen, C., Philos. Mag. 72, 813 (1995).
18.Barmak, K., Michaelsen, C., and Lucadamo, G., J. Mater. Res. 12, 133 (1997).
19.Sasanuma, Y. and Nakayama, K., Thin Solid Films 247, 24 (1994).
20.Sasanuma, Y., Uchida, M., Okada, K., Yamamoto, K., Kitano, Y., and Ishitani, A., Thin Solid Films 203, 113 (1991).
21. The expression for the gradient in Ref. 5 should have been =c = 0.8/(0.906 3 23/2σ)where the symbol s has the same meaning as the symbol β used here.
22.Clemens, B. M., private communication.

Uniformity and interfaces in ion-beam deposited Al/Ni multilayers

  • A. S. Edelstein (a1), R. K. Everett (a1), J. H. Perepezko (a2) and M. H. da Silva Bassani (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed