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Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source

  • Y. H. Cheng (a1), B. K. Tay (a1), S. P. Lau (a1), X. Shi (a1), X. L. Qiao (a2), J. G. Chen (a2), Y. P. Wu (a2), Z. H. Sun (a2) and C. S. Xie (a2)...

Abstract

Superhard and elastic carbon nitride films with hardness and elastic recovery of 47 GPa and 87.5%, respectively, were synthesized by using a double-bend filtered cathodic vacuum arc combined with radio-frequency nitrogen ion beam source. The bombardment of energetic nitrogen atom onto the growing film surface results in the high atomic ratio of N/C (0.4), which contributes to the high sp2 content and the formation of a five-membered ring structure in the carbon nitride film at room temperature. The buckling of the five-membered ring basal planes may facilitate cross-linking between the planes through sp3 coordinated carbon atoms. A rigid three-dimensional network is formed, which contributes to the high hardness and elastic recovery of the deposited films.

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a)Address all correspondence to this author e-mail: yh cheng@yahoo.com

References

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Liu, Y. and Cohen, M.L., Science 245, 841 (1989).
Liu, Y. and Cohen, M.L., Phys. Rev. B 41, 10727 (1990).
Sjostrom, H., Hultman, L., and Sundgen, J-E., J. Vac. Sci. Technol. A 14, 56 (1996).
Sjostrom, H., Stafstrom, S., Boman, M., and Sundgen, J-E., Phys. Rev. Lett. 75, 1336 (1995).
Broitman, E., Zheng, W.T., and Sjostrom, H., Appl. Phys. Lett. 72, 2532 (1998).
Ng, Y.M., Ong, C.W., Zhao, X.A., and Choy, C.L., J. Vac. Sci. Technol. A 17, 584 (1999).
Weber, F-R. and Oechsner, H., Surf. Coat. Technol. 74/75, 704 (1995).
Wei, A., Chen, D., and Ke, N., Thin Solid Films 323, 217 (1998).
Niu, C., Lu, Y.Z., and Lieber, C.M., Science 261, 334 (1993).
Lee, D.H., Park, B., Plker, D.B., Riester, L., Feng, Z.C., and Baglin, J.E.E., J. Appl. Phys. 80, 1480 (1996).
Gago, R., Jimenez, I., Albella, J.M., and Climent-Font, A., J. Appl. Phys. 87, 8174 (2000).
Tay, B.K., Shi, X., Yang, H.S., Tan, H.S., Chua, D., and Teo, S.Y., Surf. Coat. Technol. 111, 229 (1999).
Oliver, W.C. and Pharr, G.M., J. Mater. Res. 17, 1564 (1992).
Cheng, Y.H., Tay, B.K., Lau, S.P., and Shi, X., Diamond Relat. Mater. 10, 2137 (2001).
Cheng, Y.H., Tay, B.K., Lau, S.P., and Shi, X., Thin Solid Films, 379, 76 (2000).
Gilkes, K.W.R., Prawer, S., Nugent, K.W., Robertson, J., Sands, H.S.A., Lifshitz, Y., and Shi, X., J. Appl. Phys. 87, 7283 (2000).
Doyle, T.E. and Dennison, J.R., Phys. Rev. B 51, 196 (1995).
Siegal, M.P., Tallant, D.R., Provencio, P.N., Overmyer, D.L., and Simpson, R.L., Appl. Phys. Lett. 76, 3052 (2000).
Wang, P.N., Guo, Z., and Ying, X-T., Phys. Rev. B 20, 13347 (1999).
Merkulov, V.I., Lannin, J.S., and Munro, C.H., Phys. Rev. Lett. 78, 4869 (1997).
Xu, S., Flynn, D., and Tay, B.K., Philos. Mag. B 76, 351 (1997).
Holloway, B.C., Kraft, O., Shuh, D.K., Kelly, M.A., Nix, W.D., Pianetta, P., and Hagstrom, S., Appl. Phys. Lett. 74, 3290 (1999).
Siegbahn, K., Nordling, C., Fahlman, A., Nordberg, H., Hamrin, K., Hedman, J., Johansson, G., Bergmark, T., Karlsson, S-E., Lindgren, J., and Lindberg, B., ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy (Almquist & Wiksells Boktryckeri AB, Uppsala, Sweden, 1967).
Iijima, S., Nature (London) 354, 56 (1991).
Amaratunga, G.A.J., Chhowalla, M., Kiely, C.J., Alexandrou, I., Aaharonov, R., and Devenish, R.L.M., Nature 383, 321 (1996).
Hellgren, N., Johansson, M.P., Broitman, E., Hultman, L., and Sundgren, J-E., Phys. Rev. B 59, 5162 (1999).
Hu, J., Yang, P., and Lieber, C.M., Phys. Rev. B 57, R3185 (1998).
Lifshitz, Y., Diamond Relat. Mater. 5, 388 (1996).
dos, M.C. Santos and Alvarez, F., Phys. Rev. B 58, 13918 (1998).

Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source

  • Y. H. Cheng (a1), B. K. Tay (a1), S. P. Lau (a1), X. Shi (a1), X. L. Qiao (a2), J. G. Chen (a2), Y. P. Wu (a2), Z. H. Sun (a2) and C. S. Xie (a2)...

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