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Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source

Published online by Cambridge University Press:  31 January 2011

Y. H. Cheng ,
B. K. Tay ,
S. P. Lau ,
X. Shi ,
X. L. Qiao ,
J. G. Chen ,
Y. P. Wu ,
Z. H. Sun  and
C. S. Xie
Y. H. Cheng*
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
B. K. Tay
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
S. P. Lau
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
X. Shi
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
X. L. Qiao
Affiliation:
State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology, Huazhong University of science and Technology, Wuhan 430074, Hubei, People's Republic of China
J. G. Chen
Affiliation:
State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology, Huazhong University of science and Technology, Wuhan 430074, Hubei, People's Republic of China
Y. P. Wu
Affiliation:
State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology, Huazhong University of science and Technology, Wuhan 430074, Hubei, People's Republic of China
Z. H. Sun
Affiliation:
State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology, Huazhong University of science and Technology, Wuhan 430074, Hubei, People's Republic of China
C. S. Xie
Affiliation:
State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology, Huazhong University of science and Technology, Wuhan 430074, Hubei, People's Republic of China
*
a)Address all correspondence to this author e-mail: yh cheng@yahoo.com
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Abstract

Superhard and elastic carbon nitride films with hardness and elastic recovery of 47 GPa and 87.5%, respectively, were synthesized by using a double-bend filtered cathodic vacuum arc combined with radio-frequency nitrogen ion beam source. The bombardment of energetic nitrogen atom onto the growing film surface results in the high atomic ratio of N/C (0.4), which contributes to the high sp2 content and the formation of a five-membered ring structure in the carbon nitride film at room temperature. The buckling of the five-membered ring basal planes may facilitate cross-linking between the planes through sp3 coordinated carbon atoms. A rigid three-dimensional network is formed, which contributes to the high hardness and elastic recovery of the deposited films.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 17 , Issue 3 , March 2002 , pp. 521 - 524
Copyright
Copyright © Materials Research Society 2002

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