Skip to main content Accessibility help
×
Home

A study on materials interactions between Mo electrode and InGaZnO active layer in InGaZnO-based thin film transistors

  • Kyung Park, Chee-Hong An, Byung-Il Hwang, Hoo-Jeong Lee, Hyoungsub Kim (a1), Kyungseok Son, Jang-Yeon Kwon and Sangyun Lee (a2)...

Abstract

This study examined the degradation of the device performance of InGaZnO4 (IGZO)-based thin-film transistors after annealing at high temperatures in air ambient. Using various characterization methods including scanning electron microscopy, x-ray diffraction, and transmission electron microscopy, we were able to disclose the details of a two-stage phase transformation that led to the device performance degradation. The Mo electrodes first succumbed to oxidation at moderate temperatures (400∼500 °C) and then the Mo oxide further reacted with IGZO to produce an In–Mo–O compound with some Ga at higher temperatures (600∼700 °C). We analyzed our results based on the thermodynamics and kinetics data available in the literature and confirmed that our findings are in agreement with the experimental results.

Copyright

Corresponding author

a)Address all correspondence to this author. e-mail: hsubkim@skku.edu

References

Hide All
1.Sun, Y., Rogers, J.A.Inorganic semiconductors for flexible electronics. Adv. Mater. 19, 1897 (2007)
2.Nomura, K., Ohta, H., Takagi, A., Kamiya, T., Hirano, M., Hosono, H.Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature 432, 488 (2004)
3.Lim, W., Douglas, E.A., Kim, S-H., Norton, D.P., Pearton, S.J., Ren, F., Shen, H., Chang, W.H.Low-temperature-fabricated InGaZnO4 thin film transistors on polyimide clean-room tape. Appl. Phys. Lett. 93, 252103 (2008)
4.Lim, W., Douglas, E.A., Kim, S-H., Norton, D.P., Pearton, S.J., Ren, F., Shen, H., Chang, W.H.High mobility InGaZnO4 thin-film transistors on paper. Appl. Phys. Lett. 94, 072103 (2009)
5.Kim, M., Jeong, J.H., Lee, H.J., Ahn, T.K., Shin, H.S., Park, J-S., Jeong, J.K., Mo, Y-G., Kim, H.D.High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper. Appl. Phys. Lett. 90, 212114 (2007)
6.Hosono, H., Nomura, K., Ogo, Y., Uruga, T., Kamiya, T.Factors controlling electron transport properties in transparent amorphous oxide semiconductors. J. Non-Cryst. Solids 354, 2796 (2008)
7.Chiang, H.Q., McFarlane, B.R., Hong, D., Preseley, R.E., Wagner, J.F.Processing effects on the stability of amorphous indium gallium zinc oxide thin film transistors. J. Non-Cryst. Solids 354, 2826 (2008)
8.Hosono, H.Ionic amorphous oxide semiconductors: Material design, carrier transport, and device application. J. Non-Cryst. Solids 352, 851 (2006)
9.Gale, W.F., Totemier, T.C.Smithells Metals Reference Book 8th ed. (Elsevier, Oxford, UK 2004)
10.Massalaski, T.B.Binary Alloy Phase Diagrams 1st ed. (American Society for Metals, Metals Park, OH 1986)
11.Park, J-S., Jeong, J.K., Mo, Y-G., Kim, H.D., Kim, C-J.Control of threshold voltage in ZnO-based oxide thin film transistors. Appl. Phys. Lett. 93, 033513 (2008)
12.Barin, I., Knacke, O.Thermochemical Properties of Inorganic Substances (Springer-Verlag, Berlin 1973)
13.Bergner, D.Diffusion in Metals and Alloys edited by F.J. Kedves and D.L. Beke (Trans Tech Publications, Aedermannsdorf, Switzerland 1983)
14.Azad, A-M.Fine-tuning of ceramic-based chemical sensors via novel microstructural modification. Sens. Actuators, B 120, 25 (2006)
15.Fais, E., Borrmann, H., Mattausch, Hj., Simon, A.Crystal structures of two forms of In5Mo18O28 and twinning. Z. Anorg. Allg. Chem. 621, 1178 (1995)
16.Nomura, K., Takagi, A., Kamiya, T., Ohta, H., Hirano, M., Hosono, H.Amorphous oxide semiconductors for high-performance flexible thin-film transistors. Jpn. J. Appl. Phys. 45, 4303 (2006)

Keywords

A study on materials interactions between Mo electrode and InGaZnO active layer in InGaZnO-based thin film transistors

  • Kyung Park, Chee-Hong An, Byung-Il Hwang, Hoo-Jeong Lee, Hyoungsub Kim (a1), Kyungseok Son, Jang-Yeon Kwon and Sangyun Lee (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed