Hostname: page-component-8448b6f56d-sxzjt Total loading time: 0 Render date: 2024-04-18T12:22:18.162Z Has data issue: false hasContentIssue false
  • English
  • Français

Space filling by nucleation and growth in chemical vapor deposition of diamond

Published online by Cambridge University Press:  31 January 2011

J. Stiegler ,
Y. von Kaenel ,
M. Cans  and
E. Blank
J. Stiegler
Affiliation:
Département de Matériaux, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
Y. von Kaenel
Affiliation:
Département de Matériaux, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
M. Cans
Affiliation:
Département de Matériaux, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
E. Blank
Affiliation:
Département de Matériaux, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
Get access

Abstract

Phase transformations, including chemical vapor deposition (CVD) of diamond, taking place by nucleation and growth are commonly described by Avrami or Johnson-Mehl type models. In order to avoid the restrictions of such models with respect to assumptions concerning nucleation rates and growth velocities, the variation with time of nucleation and growth of diamond particles during the deposition of microwave plasma-assisted CVD was studied. The size distributions obtained from image analysis enabled us to trace back details of the nucleation and growth history. Three sources of particle formation were operating during deposition. A general growth law suitable for all particles did not exist. These observations limited the applicability of Avrami-type models to describe space filling. Computer simulation of surface coverage and particle growth was successful because one particular mode of particle formation and growth dominated surface coverage. Based on image analysis and the determination of the film growth rate, the evolution of the diamond volume fraction with time, starting from three-dimensional particle growth followed by a continuous transition to one-dimensional film growth, was described.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 3 , March 1996 , pp. 716 - 726
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Eskildsen, S. S., in 2nd Int. Conf. on the Applic. of Diamond Films and Relat. Mater., edited by Yoshikawa, M., Murakawa, M., Tzeng, Y., and Yarbrough, W. A. (Tokyo, 1993), p. 297.Google Scholar
2.Iijima, S., Aikawa, Y., and Baba, K., J. Mater. Res. 6, 1491 (1991).Google Scholar
3.Maeda, H., Ikari, S., Okubo, T., Kusakabe, K., and Morooka, S., J. Mater. Sci. 28, 129 (1993).Google Scholar
4.Denning, P. A. and Stevenson, D. A., Appl. Phys. Lett. 59, 1562 (1991).CrossRefGoogle Scholar
5.Avigal, Y., Diamond Relat. Mater. 1, 216 (1992).CrossRefGoogle Scholar
6.Kim, J. W., Baik, Y-J., and Eun, K. Y., Diamond Relat. Mater. 1, 200 (1992).Google Scholar
7.Tomellini, M., Polini, R., and Sessa, V., J. Appl. Phys. 70, 7573 (1991).CrossRefGoogle Scholar
8.Molinari, E., Polini, R., Terranova, M. L., Ascarelli, P., and Fontana, S., J. Mater. Res. 7, 1778 (1992).Google Scholar
9.Molinari, E., Polini, R., Sessa, V., Terranova, M.L., and Tomellini, M., J. Mater. Res. 8, 785 (1993).CrossRefGoogle Scholar
10.Tomellini, M., J. Appl. Phys. 72, 1589 (1992).CrossRefGoogle Scholar
11.Avrami, M., J. Chem. Phys. 7, 1103 (1939); J. Chem. Phys. 8, 212 (1940).CrossRefGoogle Scholar
12.Johnson, W. and Mehl, R., Trans AIME 135, 416 (1939).Google Scholar
13.Mathis, B. S. and Bonnot, A. M., Diamond Relat. Mater. 2, 718 (1993).Google Scholar
14.von Kaenel, Y., Stiegler, J., and Blank, E., Diamond Relat. Mater. 4, 972 (1995).Google Scholar
15.Cans, M., Stiegler, J., and Blank, E., unpublished.Google Scholar
16.Jiang, N., Sun, B. W., Zhang, Z., and Lin, Z., J. Mater. Res. 9, 2695 (1994).Google Scholar
17.Bauer, R. A., Sbrockey, N. M., and Brower, W. E., Jr., J. Mater. Res. 8, 2858 (1993).CrossRefGoogle Scholar
18.Ascarelli, P. and Fontana, S., Diamond Relat. Mater. 2, 990 (1993).Google Scholar
19.Joffreau, P. O., Haubner, R., and Lux, B., in Extended Abstracts No. 15, Diamond and Diamond-Like Materials Synthesis, edited by Johnson, G. H., Badzian, A. R., and Geis, M. W. (Materials Research Society, Pittsburgh, PA, 1988), p. 15.Google Scholar
20.Haubner, R., Lindlbauer, A., and Lux, B., Diamond Relat. Mater. 2, 1505 (1993).Google Scholar
21.Kweon, D. and Lee, J.Z., J. Appl. Phys. 69, 4272 (1990).CrossRefGoogle Scholar