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Secondary ion mass spectrometry study of Ti4+ diffusion properties in congruent Er:LiNbO3 codoped with moderate concentration of MgO

  • De-Long Zhang (a1), Bei Chen (a2), Liang Sun, Yu-Heng Xu (a3) and Edwin Yue-Bun Pun (a4)...


At 1100 °C, the diffusion properties of Ti4+ into congruent LiNbO3 crystals codoped with 0.5 mol% Er2O3 and different MgO concentrations of 0.5, 1.0, and 1.5 mol% have been studied by secondary ion mass spectrometry (SIMS). Three Y-cut and three Z-cut plates with different Mg doping levels were coated with a 60-nm-thick Ti film at first and then annealed at 1100 °C for 28 h in a wet O2 atmosphere. SIMS was used to analyze depth profile characteristics of diffused Ti ions and the constituent elements of the substrate as well. The results show that the diffusion reservoir was exhausted and the Ti metal film was completely diffused. All measured Ti profiles follow a Gaussian function. No Mg out-diffusion accompanied the Ti in-diffusion procedure for all crystals studied. The 1/e diffusion depth is similar to 8.3/10.2, 7.4/8.7, and 6.6/8.2 ± 0.2/0.2 μm/μm for the Y/Z-cut crystal with the Mg doping level of 0.5, 1.0, and 1.5 mol%, respectively, yielding a Ti4+ diffusivity of 0.62/0.93, 0.49/0.67, and 0.39/0.60 ± 0.03/0.03 (μm2/h)/(μm2/h), respectively. The diffusion shows definite anisotropy and a considerable MgO doping level effect. Under the same Mg doping level, the diffusion in a Z-cut crystal is faster. The diffusivity decreases with the increase of the Mg doping level. This effect is qualitatively explained from the viewpoint of the Mg doping effect on concentration of the intrinsic defects in LiNbO3 crystal.


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1.Brinkmann, R., Sohler, W., and Suche, H.: Continuous-wave erbium-diffused LiNbO3 waveguide laser. Electron. Lett. 27, 415 (1991).
2.Becker, Ch., Oesselke, T., Pandavenes, J., Ricken, R., Rochhausen, K., Schreiberg, G., Sohler, W., Suche, H., Wessel, R., Balsamo, S., Montrosset, I., and Sciancalepore, D.: Advanced Ti: Er:LiNbO3 waveguide lasers. IEEE J. Sel. Top. Quantum Electron. 6, 101 (2000).
3.Amin, J., Aust, J.A., and Sanford, N.A.: Z-propagating waveguide lasers in rare-earth-doped Ti:LiNbO3. Appl. Phys. Lett. 69, 3785 (1996).
4.Helmfrid, S., Arvidsson, G., Webjorn, J., Linnarsson, M., and Pihl, T.: Stimulated emission in Er:Ti:LiNbO3 waveguides close to 1.53 μm transition. Electron. Lett. 27, 913 (1991).
5.Huang, C.H. and McCaughan, L.: 980-nm-pumped Er-doped LiNbO3 waveguide amplifiers: A comparison with 1484-nm pumping. IEEE J. Sel. Top. Quantum Electron. 2, 367 (1996).
6.Huang, C.H. and McCaughan, L.: Photorefractive-damage-resistant Er-indiffused MgO:LiNbO3 ZnO-waveguide amplifier and lasers. Electron. Lett. 33, 1639 (1997).
7.Cantelar, E., Torchia, G.A., Sanz-Garcia, J.A., Pernas, P.L., Lifante, G., and Cusso, F.: Red, green, and blue simultaneous generation in a periodically poled Zn-diffused LiNbO3:Er3+/Yb3+ nonlinear channel waveguides. Appl. Phys. Lett. 83, 2991 (2003).
8.Das, B.K., Ricken, R., and Sohler, W.: Integrated optical distributed feedback laser with Ti:Fe:Er:LiNbO3 waveguide. Appl. Phys. Lett. 83, 1515 (2003).
9.Das, B.K., Ricken, R., Quiring, V., Suche, H., and Sohler, W.: Distributed feedback-distributed Bragg reflector coupled cavity laser with a Ti:(Fe:)Er:LiNbO3 waveguide. Opt. Lett. 29, 165 (2004).
10.Schreiber, G., Hofmann, D., Grundkotter, W., Lee, Y.L., Suche, H., Quiring, V., Ricken, R., and Sohler, W.: Nonlinear integrated optical frequency conversion in periodically poled Ti:LiNbO3 waveguides. Proc. SPIE 4277, 144 (2001).
11.Zhong, G.G., Jin, J., and Wu, Z.K.: Measurements of optically induced refractive-index damage of lithium niobate doped with different concentrations of MgO. J. Opt. Soc. Am. 70, 631 (1980).
12.Bryan, D.A., Gerson, R., and Tomaschke, H.E.: Increased optical damage resistance in lithium niobate. Appl. Phys. Lett. 44, 847 (1984).
13.Furukawa, Y., Kitamura, K., Takekawa, S., Miyamoto, A., Terao, M., and Suda, N.: Photorefraction in LiNbO3 as a function of [Li]/[Nb] and MgO concentrations. Appl. Phys. Lett. 77, 2494 (2000).
14. Á. Péter, K. Polgár, L. Kovács, and Lengyel, K.: Threshold concentration of MgO in near-stoichiometric LiNbO3 crystals. J. Cryst. Growth 284, 149 (2005).
15.Bulmer, C.H.: Characterization of Ti-indiffused waveguides in MgO-doped LiNbO3. Electron. Lett. 20, 902 (1984).
16. A. Sjöberg, Arvidsson, G., and Lipovskii, A.A.: Characterization of waveguides fabricated by titanium diffusion in magnesiumdoped lithium niobate. J. Opt. Soc. Am. B 5, 285 (1988).
17.Cantelar, E., Sanz-García, J.A., and Cussó, F.: Growth of LiNbO3 co-doped with Er3+/Yb3+. J. Cryst. Growth 205, 196 (1999).
18.Jackel, J.L., Ramaswamy, V., and Lyman, S.P.: Elimination of outdiffused surface guiding in titanium-diffused LiNbO3. Appl. Phys. Lett. 38, 509 (1981).
19.Hu, L.J., Chang, Y.H., Lin, I.N., and Yang, S.J.: Defects of lithium niobate crystals heavily doped with MgO. J. Cryst. Growth 114, 191 (1991).
20.Crank, J.: The Mathematics of Diffusion, 2nd ed. (Clarendon Press, Oxford, UK, 1985), p. 11.
21.Noda, J. and Fukuma, M.: Optical properties of titanium-diffused LiNbO3 strip waveguides and their coupling-to-a-fiber characteristics. Appl. Opt. 19, 591 (1980).
22.Fouchet, S., Carenco, A., Daguet, C., Guglielmi, R., and Riviere, L.: Wavelength dispersion of Ti induced refractive index change in LiNbO3 as a function of diffusion parameters. J. Lightwave Technol. 3, 700 (1987).
23.Baumann, I., Brinkmann, R., Dinand, M., Sohler, W., Beckers, L., Buchal, Ch., Fleuster, M., Holzbrecher, H., Paulus, H., Muller, K.H., Gog, Th., Materlik, G., Witte, O., Stolz, H., and von der Osten, W.: Erbium incorporation in LiNbO3 by diffusion-doping. Appl. Phys. A 64, 33 (1997).
24.Nevado, R., Cusso, F., Lifante, G., Caccavale, F., Sada, C., and Segato, F.: Correlation between compositional and refractive index profiles in LiNbO3:Zn diffused optical waveguides. J. Appl. Phys. 88, 6183 (2000).
25.Holmes, R.J. and Smyth, D.M.: Titanium diffusion into LiNbO3 as a function of stoichiometry. J. Appl. Phys. 55, 3531 (1984).
26.Noda, J., Fukuma, M., and Saito, S.: Effect of Mg diffusion on Tidiffused LiNbO3 waveguides. J. Appl. Phys. 49, 3150 (1978).
27.Sugii, K., Fukuma, M., and Iwasaki, H.: A study of titanium diffusion into LiNbO3 waveguides by electron probe analysis and x-ray diffraction methods. J. Mater. Sci. 13, 523 (1978).
28.Lerner, P., Legras, C., and Dumas, J.P.: Stoichiometry of single-crystal of lithium metaniobate. J. Cryst. Growth 3–4, 231 (1968).
29.Iyi, N., Kitamura, K., Izumi, F., Yamamoto, J.K., Hayashi, T., Asano, H., and Kimura, S.: Comparative study of defect structures in lithium niobate with different compositions. J. Solid State Chem. 101, 340 (1992).
30.Wilkinson, A.P., Cheetham, A.K., and Jarman, R.H.: Defect structure of congrently melting lithium niobate. J. Appl. Phys. 74, 3080 (1993).
31.Zotov, N., Boysen, H., Frey, F., Metzger, T., and Born, E.: Cation substitution models of congruent LiNbO3 investigated by x-ray and neutron powder diffraction. J. Phys. Chem. Solids 55, 145 (1994).
32.Watanabe, Y., Sota, T., Suzuki, K., Iyi, N., Kitamura, K., and Kimura, S.: Defect structures in LiNbO3. J. Phys. Condens. Matter 7, 3627 (1995).
33.Iyi, N., Kitamura, K., Yajima, Y., and Kimura, S.: Defect structure model of MgO-doped LiNbO3. J. Solid State Chem. 118, 148 (1995).
34.Conradi, D., Merschjann, C., Schoke, B., Imlau, M., Corradi, G., and Polgár, K.: Influence of Mg doping on the behaviour of polaronic light-induced absorption in LiNbO3. Phys. Status Solidi 2, 284 (2008).
35.Maxein, D., Kratz, S., Reckenthaeler, P., Bükers, J., Haertle, D., Woike, T., and Buse, K.: Polarons in magnesium-doped lithium niobate crystals induced by femtosecond light pulses. Appl. Phys. B 92, 543 (2008).
36.Harhira, A., Guilbert, L., Bourson, P., and Rinnert, H.: Polaron luminescence in iron-doped lithium niobate. Appl. Phys. B 92, 555 (2008).
37.Kovacs, L., Rebouta, L., Soares, J.C., and Silva, M.F.da: Lattice site of Er in LiNbO3:Mg, Er crystals. Radiat. Eff. Defects Solids 119, 445 (1991).
38.Kovacs, L., Rebouta, L., Soares, J.C., Silva, M.F.da, Hage-Ali, M., Stoquert, J.P., Siffert, P., Sanz-Garcia, J.A., Corradi, G., Szaller, Zs., and Polgar, K.: On the lattice site of trivalent dopants and the structure of Mg2+–OH°–M3+ defects in LiNbO3:Mg crystals. J. Phys. Condens. Matter 5, 781 (1993).
39.Armenise, M.N., Canali, C., De Sario, M., Carnera, A., Mazzoldi, P., and Celloti, G.: Characterization of (Ti0.65Nb0.35)O2 compound as a source for Ti-diffusion during Ti:LiNbO3 optical waveguides fabrication. J. Appl. Phys. 54, 62 (1983).
40.Rice, C.E. and Holmes, R.J.: A new rutile structure solid-solution phase in the LiNb3O8–TiO2 system, and its role in Ti diffusion into LiNbO3. J. Appl. Phys. 60, 3836 (1986).
41.Silva, H.F. da, Filho, J.M., Zilio, S.C., and Nunes, F.D.: Modeling Ti in-diffusion in LiNbO3. J. Phys. Condens. Matter 9, 357 (1997).
42.Zolotoyabko, E., Avrahami, Y., Sauer, W., Metzger, T.H., and Peisl, J.: High-temperature phase transformation in Ti-diffused waveguide layers of LiNbO3. Appl. Phys. Lett. 73, 1352 (1998).
43.Haruna, M., Sewai, H., Nishihara, H., Ikunishi, S., Gozen, T., and Tanaka, H.: Efficient laser oscillation in thermally Nd-diffused MgO:LiNbO3, single-mode waveguides. Electron. Lett. 30, 412 (1994).
44.Zhang, D.L., Hua, P.R., and Pun, E.Y.B.: Er3+ diffusion in congruent LiNbO3 crystal doped with 4.5 mol% MgO. J. Appl. Phys. 103, 113513 (2007).
45.Caccavale, F., Chakraborty, P., Capobianco, A., Gianello, G., and Mansour, I.: Characterization and optimization of Ti-diffused LiNbO3 optical waveguides by second diffusion of magnesium. J. Appl. Phys. 78, 187 (1995).


Secondary ion mass spectrometry study of Ti4+ diffusion properties in congruent Er:LiNbO3 codoped with moderate concentration of MgO

  • De-Long Zhang (a1), Bei Chen (a2), Liang Sun, Yu-Heng Xu (a3) and Edwin Yue-Bun Pun (a4)...


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