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Secondary ion mass spectrometry study of erbium diffusion in lithium niobate crystals

Published online by Cambridge University Press:  31 January 2011

F. Caccavale ,
F. Segato ,
I. Mansour ,
J. M. Almeida  and
A. P. Leite
F. Caccavale
Affiliation:
Istituto Nazionale di Fisica della Materia-Università di Padova, Dipartimento di Fisica, via Marzolo 8, 35131 Padova, Italy
F. Segato
Affiliation:
Istituto Nazionale di Fisica della Materia-Università di Padova, Dipartimento di Fisica, via Marzolo 8, 35131 Padova, Italy
I. Mansour
Affiliation:
Università di Padova, Dipartimento di Elettronica ed Informatica, via Gradenigo 6/A, 35131 Padova, Italy
J. M. Almeida
Affiliation:
Centro de Física do Porto, Faculdade de Ciências, Universidade do Porto, Rua do Campo Alegre, 687, 4150 Porto, Portugal
A. P. Leite
Affiliation:
Centro de Física do Porto, Faculdade de Ciências, Universidade do Porto, Rua do Campo Alegre, 687, 4150 Porto, Portugal
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Abstract

A systematic investigation of erbium diffusion in lithium niobate (LiNbO3) crystal as a function of crystal cut-direction, diffusion process parameters (temperature and time), and initial film thickness is reported. Depth concentration profiles of erbium are obtained by secondary ion mass spectrometry (SIMS). Combining experimental data with diffusion theory, the relevant diffusion parameters are derived. Diffusion from an infinite source of erbium ions is studied to evaluate the solid solubility lower limit of Er in LiNbO3. A thin film diffusion regime, with complete depletion of ion source, is also investigated. A comparison of Er diffusion with Er/Ti codiffusion in LiNbO3 crystals is reported.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 6 , June 1998 , pp. 1672 - 1678
Copyright
Copyright © Materials Research Society 1998

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References

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