Skip to main content Accessibility help

Relationships between the thermal stability, friction, and wear properties of reactively sputtered Si–aC:H thin films

  • Ryan D. Evans (a1), Gary L. Doll (a1) and Jeffrey T. Glass (a2)


The friction and wear performance were correlated with the thermal stability of reactively sputtered Si–aC:H thin films containing various Si and H concentrations. The average steady-state friction coefficients as measured by dry sliding pin-on-disk tests decreased with increasing Si and H content. Furthermore, the films with high Si and H formed thick transfer films as compared to the films with little or no Si and H content. Minimums in average ball abrasion rate and average film wear rate were observed at the Si/C = 0.10 film composition. The most intense and distinct “graphitic” Raman peaks were collected from the Si/C = 0.10 transfer film debris. In addition, the Si/C = 0.10 film also had the most distinguishable graphitic Raman signature after annealing in air at 500 °C compared to the other Si–aC:H films, suggesting a possible relationship between the nature of transfer films resulting from dry sliding in air and the bulk films that were annealed in air.



Hide All
1.Donnet, C., Belin, M., Auge, J.C., Martin, J.M., Grill, A., and V. Patel, Surf. Coat. Technol. 68/69, 626 (1994).
2.Ronkainen, H., Likonen, J., Koskinen, J., and Varjus, S., Surf. Coat. Technol. 79, 87 (1996).
3.Liu, Y., Erdemir, A., and Meletis, E.I., Surf. Coat. Technol. 86–87, 564 (1996).
4.Liu, Y. and Meletis, E.I., J. Mater. Sci. 32, 3491 (1997).
5.Oguri, K. and Arai, T., Surf. Coat. Technol. 47, 710 (1991).
6.Wu, W.J., Pai, T.M., and Hon, M.H., Diamond Relat. Mater. 7, 1478 (1998).
7.Kim, M.G., Lee, K.R., and Eun, K.Y., Surf. Coat. Technol. 112, 204 (1999).
8.Gilmore, R. and Hauert, R., Thin Solid Films 398–399, 199 (2001).
9.Evans, R.D., Doll, G.L., Morrison, P.W. Jr., Bentley, J., More, K.L., and Glass, J.T., Surf. Coat. Technol. 157, 197 (2002).
10.Wu, W.J. and Hon, M.H., Surf. Coat. Technol. 111, 134 (1999).
11.Harris, S.J. and Weiner, A.M., Wear 223, 31 (1998).
12.Singer, I.L., MRS Bull. (June), 37 (1998).
13.Nemanich, R.J. and Solin, S.A., Phys. Rev. B 20(2), 392 (1979).
14.Ferrari, A.C. and Robertson, J., Phys. Rev. B 61(20), 14095 (2000).
15.Harris, S.J., Krauss, G.G., Simko, S.J., Baird, R.J., Gebremariam, S.A., and Doll, G., Wear 252, 161 (2002).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed