Skip to main content Accessibility help
×
Home

Relationship between the structural organization and the physical properties of PECVD nitrogenated carbons

  • M. Ricci (a1), M. Trinquecoste (a1), F. Auguste (a1), R. Canet (a1), P. Delhaes (a1), C. Guimon (a2), G. Pfister-Guillouzo (a2), B. Nysten (a3) and J.P. Issi (a3)...

Abstract

By a Plasma Enhanced Chemical Vapor Deposition process (PECVD), we are able to prepare nitrogenated amorphous carbon materials around room temperature from methane and nitrogen gas as precursors. We have also used chlorine gas as an additive to reduce the hydrogen content of our samples. Starting from the “as-deposited” materials, we have investigated their thermal stability by successive heat treatments up to 1400 °C. These compounds suffer a weight loss mostly due to the hydrogen departure. They become nonfusible and it turns out that nitrogen, chemically bound to sp2 hybridized carbons, induces some changes in the physical properties. In order to understand the relationship between the local structural organization and the physical characteristics, we have investigated different spectroscopic techniques such as Nuclear Magnetic Resonance, IR Absorption, and X-ray Photoelectron Spectroscopy. We have also investigated several transport properties: (i) The dc electrical conductivity shows a kind of metal/insulator transition around 700 °C. The temperature dependence for the conductive samples gives evidence for a pseudogap associated with the presence of localized states, (ii) The thermal conductivity exhibits, for the as-deposited compound, a very low value varying slowly with temperature; its magnitude as well as its temperature dependence, characteristic of noncrystalline materials, are modified by the annealing process. Finally, an electronic band model is proposed, explaining the structural evolution through a kind of Mott–Anderson pseudotransition.

Copyright

References

Hide All
1Spitsyn, B. V., Bouilov, L. L., and Derjaguin, B. V., Prog. Cryst. Growth Charact. 17, 79170 (1988).
2Kaufman, J. H., Metin, S., and Saperstein, D. D., Phys. Rev. B 39, 1305313060 (1989).
3Han, H.X. and Feldman, B.J., Solid State Commun. 65, 921923 (1988).
4Ricci, M., Trinquecoste, M., and Delhaes, P., Surf. Coatings Technol. 47, 299307 (1991).
5Ricci, M., Ph.D. Thesis, University of Bordeaux I (1991).
6Kaplan, S., Jansen, F., and Machonkin, M., Appl. Phys. Lett. 47, 750753 (1985).
7Pan, H., Pruski, M., Gerstein, B. L., Li, F., and Lannin, J. S., Phys. Rev. B 44, 67416745 (1991).
8Derenne, S., Largeau, C., Casadevall, E., and Laupretre, F., J. Chim. Phys. 84, 1016 (1987).
9Sette, F., Wertheim, G. K., Ma, Y., Heigs, G., Modesti, S., and Chen, C. T., Phys. Rev. B 41, 97669770 (1990).
10Estrade-Szwarckoff, H. and Rousseau, B., J. Phys. Chem. Solids 53, 419436 (1992).
11Wells, S. K., Giergel, J., Land, T.A., Lindquist, J.M., and Hemminger, J. C., Surf. Sci. 257, 129145 (1991).
12Carmona, F. and Delhaes, P., J. Appl. Phys. 49, 618628 (1978).
13Mott, N.F., Philos. Mag. B 44, 265284 (1981).
14Frauenheim, T., Stephan, U., Bewiloga, K., Jungnickel, F., Blaudeck, P., and Fromm, E., Thin Solid Films 182, 6378 (1989).
15Hauser, J.J., J. Non-Cryst. Solids 23, 2141 (1977).
16Carmona, F., Delhaes, P., Keryer, G., and Manceau, J. P., Solid State Commun. 14, 11831187 (1974).
17Piraux, L., Issi, J. P., and Coopmans, P., Measurement 5, 2 (1987).
18Elliott, S. R., Physics of Amorphous Materials (Longman Scientific & Technical, London, England, 1983).
19Gardner, J. W. and Anderson, A. C., J. Appl. Phys. 50, 30123014 (1978).
20Nysten, B., Issi, J. P., Barton, R., Boyington, D. R., and Lavin, J. G., Phys. Rev. B 44, 21422148 (1991).
21Delhaes, P. and Hishiyama, Y., Carbon 8, 3137 (1970).
22Kaburagi, Y., Hishiyama, Y., Baker, D. F., and Bragg, R. H., Philos. Mag. B 54, 381389 (1986).
23Liu, A.Y. and Cohen, M.L., Phys. Rev. B 41, 1072710734 (1990).

Relationship between the structural organization and the physical properties of PECVD nitrogenated carbons

  • M. Ricci (a1), M. Trinquecoste (a1), F. Auguste (a1), R. Canet (a1), P. Delhaes (a1), C. Guimon (a2), G. Pfister-Guillouzo (a2), B. Nysten (a3) and J.P. Issi (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed