Skip to main content Accessibility help
×
Home

Optical and electrical properties of transparent conducting In2O3–ZrO2 films

  • S. B. Qadri (a1), H. Kim (a2), H. R. Khan (a3), A. Piqué (a1), J. S. Horwitz (a1), D. Chrisey (a1) and E. F. Skelton (a1)...

Extract

The optical transparencies and electrical conductivities of thin films of In2O3 mixed with ZrO2 have been investigated. These films were deposited on glass substrates at room temperature using pulsed-laser deposition. Indium–zirconium oxide films with a ZrO2 content up to a 15 wt% were conducting and more than 80% transparent from 450 to 700 nm. As the ZrO2 content increased from 0 to 15 wt%, the electrical resistivities increased from 1.28 × 10−3 to 6.48 × 10−2 Ω cm, the carrier densities were decreased from 2.14 × 1020 to 1.0 × 1018/cm3, and the Hall mobilities decreased from 21 to 5 cm2 V−1 s−1, all monotonically.

Copyright

References

Hide All
1.Dawar, A.L. and Joshi, J.C., J. Mater. Sci. 19, 1 (1984).
2.Chopra, K.L., Major, S., and Pandya, D.K., Thin Solid Films, 102, 1 (1983).
3.Yamamoto, S., Yamanaka, T., and Ueda, Z., J. Vac. Sci. Technol. A5, 1957 (1987).
4.Minami, T., Sato, H., Nanto, H., and Takata, S., Jpn. J. Appl. Phys. 24, L781 (1985).
5.Mott, N.F. and Gurney, R.W., Electronic Processes in Ionic Crystals (Oxford Univ. Press, London and New York, 1948).
6.Aitchison, R.E., Aust. J. Appl. Sci. 5, 10 (1954).
7.Verwey, E.J., Haiijman, P.W., Romeijn, F.C., and Van Oosterhut, G.W., Philips Res. Rep. 5, 173 (1950).
8.Kofstad, P., Nonstoichiometry, Diffusion, and Electrical Conductivity in Binary Metal Oxides (Wiley, New York, 1972).
9.Wagner, C., J. Phys. Chem. Solids 33, 105 (1972).
10.Kim, H., Piqué, A., Horwitz, J.S., Mattoussi, H., Murata, H., Kafafi, Z.H., and Chrisey, D.B., Appl. Phys. Lett. 74, 3444 (1999).
11.Coutal, C., Azema, A., and Roustan, J-C., Thin Solid Films 288, 248 (1996).
12.Qadri, S.B., Skelton, E.F., Lubitz, P., Nguyen, N.V., and Khan, H.R., Thin Solid Films 290–291, 80 (1996).
13.Qadri, S.B., Skelton, E.F., Harford, M.Z., Jones, R., and Lubitz, P., J. Vac. Sci. Technol. A9, 510 (1991).
14.Qadri, S.B., Khan, H.R., Skelton, E.F., and Lubitz, P., Surf. Coat. Technol. 100–101, 94 (1998).
15.Teufer, G., Acta Crystallogr. 15, 1187 (1962).
16.Subba Rao, E.C., in Science and Technology of Zirconia, Advances in Ceramics Vol. 3, edited by Heuer, A.H. and Hobbs, L.W. (American Ceramic Society, Columbus, OH, 1981), pp. 124.
17. JCPDS Card No. 06-0416.
18.Ploc, R.A., Proc. Annu. Meet. Microsc. Soc. Can. VII, 34 (1980).
19.Weiher, R.L. and Ley, R.P., J. Appl. Phys. 37, 299 (1966).
20.Hamberg, I. and Granqvist, C.G., J. Appl. Phys. 60, R123 (1986).
21.Emeline, A., Kataeva, G.V., Litke, A.S., Rudakova, A.V., Ryabchuk, V.K., and Serpone, N., Langmuir 14, 50115022 (1998).
22.Sanz, J.M., Gonzalez-Elipe, A.R., Fernandez, A., Leinen, D., Galan, L., Stampe, A., and Bradshaw, A.M., Surf. Sci. 307–309, 848 (1994).
23.Hartnagel, H.L., Dawar, A.L., Jain, A.K., and Jagadish, C., Semiconducting Transparent Thin Films (Institute of Physics Publishing, Bristol and Philadelphia, 1995).

Optical and electrical properties of transparent conducting In2O3–ZrO2 films

  • S. B. Qadri (a1), H. Kim (a2), H. R. Khan (a3), A. Piqué (a1), J. S. Horwitz (a1), D. Chrisey (a1) and E. F. Skelton (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed