- Cited by 34
Taschuk, Michael T. Hawkeye, Matthew M. and Brett, Michael J. 2010. Handbook of Deposition Technologies for Films and Coatings. p. 621.
Xiao, Xiudi Dong, Guoping Shao, Jianda He, Hongbo and Fan, Zhengxiu 2010. Optical and electrical properties of SnO2:Sb thin films deposited by oblique angle deposition. Applied Surface Science, Vol. 256, Issue. 6, p. 1636.
Leem, J.W. and Yu, J.S. 2010. Structural, optical, and electrical properties of AZO films by tilted angle sputtering method. Thin Solid Films, Vol. 518, Issue. 22, p. 6285.
Leem, Jung Woo and Yu, Jae Su 2011. Influence of oblique-angle sputtered transparent conducting oxides on performance of Si-based thin film solar cells. physica status solidi (a), Vol. 208, Issue. 9, p. 2220.
Leem, J.W. and Yu, J.S. 2011. Physical properties of electrically conductive Sb-doped SnO2 transparent electrodes by thermal annealing dependent structural changes for photovoltaic applications. Materials Science and Engineering: B, Vol. 176, Issue. 15, p. 1207.
Jang, Sung Jun Song, Young Min Yeo, Chan Il Park, Chang Young and Lee, Yong Tak 2011. Highly tolerant a-Si distributed Bragg reflector fabricated by oblique angle deposition. Optical Materials Express, Vol. 1, Issue. 3, p. 451.
Leem, Jung Woo and Yu, Jae Su 2011. Glancing angle deposited ITO films for efficiency enhancement of a-Si:H/μc-Si:H tandem thin film solar cells. Optics Express, Vol. 19, Issue. S3, p. A258.
Zhu, Hao Cao, Wei Larsen, George K. Toole, Ryan and Zhao, Yiping 2012. Tilting angle of nanocolumnar films fabricated by oblique angle deposition. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue. 3, p. 030606.
Leem, Jung Woo and Yu, Jae Su 2012. Broadband and wide-angle distributed Bragg reflectors based on amorphous germanium films by glancing angle deposition. Optics Express, Vol. 20, Issue. 18, p. 20576.
Sorge, J. B. Taschuk, M. T. Wakefield, N. G. Sit, J. C. and Brett, M. J. 2012. Metal oxide morphology in argon-assisted glancing angle deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue. 2, p. 021507.
Leem, Jung Woo and Yu, Jae Su 2012. Indium tin oxide subwavelength nanostructures with surface antireflection and superhydrophilicity for high-efficiency Si-based thin film solar cells. Optics Express, Vol. 20, Issue. S3, p. A431.
Song, Chunyuan Larsen, George K. and Zhao, Yiping 2013. Anisotropic resistivity of tilted silver nanorod arrays: Experiments and modeling. Applied Physics Letters, Vol. 102, Issue. 23, p. 233101.
Leem, Jung Woo and Yu, Jae Su 2013. Multi-functional antireflective surface-relief structures based on nanoscale porous germanium with graded refractive index profiles. Nanoscale, Vol. 5, Issue. 6, p. 2520.
Leem, Jung Woo Jun, Dong-Hwan Heo, Jonggon Park, Won-Kyu Park, Jin-Hong Cho, Woo Jin Kim, Do Eok and Yu, Jae Su 2013. Single-material zinc sulfide bi-layer antireflection coatings for GaAs solar cells. Optics Express, Vol. 21, Issue. S5, p. A821.
2014. Glancing Angle Deposition of Thin Films. p. 173.
2014. Glancing Angle Deposition of Thin Films. p. 113.
Yao, Kun Toole, Ryan Basnet, Pradip and Zhao, Yiping 2014. Highly sensitive double-layered nanorod array gas sensors prepared by oblique angle deposition. Applied Physics Letters, Vol. 104, Issue. 7, p. 073110.
Leem, Jung Woo Guan, Xiang-Yu and Yu, Jae Su 2014. Tunable distributed Bragg reflectors with wide-angle and broadband high-reflectivity using nanoporous/dense titanium dioxide film stacks for visible wavelength applications. Optics Express, Vol. 22, Issue. 15, p. 18519.
Lu, Jong-Hong Chen, Bo-Ying and Wang, Chih-Hsuan 2014. Investigation of nanostructured transparent conductive films grown by rotational-sequential-sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue. 2, p. 02B107.
Yeo, Chan Il Choi, Hee Ju Song, Young Min Kang, Seok Jin and Lee, Yong Tak 2015. A single-material graded refractive index layer for improving the efficiency of III–V triple-junction solar cells. Journal of Materials Chemistry A, Vol. 3, Issue. 14, p. 7235.
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The optical and electrical properties of “tilted” and “spiral” indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.
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- ISSN: 0884-2914
- EISSN: 2044-5326
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