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New methods of analyzing indentation experiments on very thin films

  • Han Li (a1), Nicholas X. Randall (a2) and Joost J. Vlassak (a1)


Indentation experiments on thin films are analyzed by using a rigorous solution to model elastic substrate effects. Two cases are discussed: elastic indentations where film and substrate are anisotropic and elastoplastic indentations where significant material pileup occurs. We demonstrate that the elastic modulus of a thin film can be accurately measured in both cases, even if there is significant elastic mismatch between film and substrate.


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