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Nanoindentation study of plasticity length scale effects in LIGA Ni microelectromechanical systems structures

Published online by Cambridge University Press:  26 July 2012

J. Lou ,
P. Shrotriya ,
T. Buchheit ,
D. Yang  and
W. O. Soboyejo
J. Lou
Affiliation:
Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey 08544
P. Shrotriya
Affiliation:
Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey 08544
T. Buchheit
Affiliation:
Mechanical Reliability and Modeling Department, Sandia National Laboratories, Albuquerque, New Mexico 87185
D. Yang
Affiliation:
Hysitron, Inc., Minneapolis, Minnesota 55439
W. O. Soboyejo
Affiliation:
Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey 08544
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Abstract

This paper presents the results of a nanoindentation study of the effects of strain gradient plasticity on the elastic–plastic deformation of lithographie, galvanoformung, abformung (LIGA) Ni microelectromechanical systems (MEMS) structures plated from sulfamate baths. Both Berkovich and North Star/cube corner indenter tips were used in the study to investigate possible effects of residual indentation depth on the hardness of LIGA Ni MEMS structures between the micro- and nanoscales. A microstructural length scale parameter, , was determined for LIGA nickel films. This is shown to be consistent with a stretch gradient length-scale parameter, ls, of approximately 0.9 μm.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 3 , March 2003 , pp. 719 - 728
Copyright
Copyright © Materials Research Society 2003

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