Skip to main content Accessibility help
×
Home

Micron thick epitaxial (100) Ag film growth on MgO

  • A. C. Carter (a1), W. Chang (a1), S. B. Qadri (a1), J. S. Horwitz (a1), Robert Leuchtner (a1) and D. B. Chrisey (a1)...

Abstract

Epitaxial films of (100) Ag were deposited onto (100) MgO substrates to a thickness of 4 μm with no evidence of (111) nucleation. Deposited films were smooth and had large areas, 50 × 50 microns square, free of morphological defects. Films were deposited using a two-step process. First, pulsed laser deposition was used to grow a 1000 Å Ag (100) seed layer on the MgO substrate. Second, e−beam evaporation was used to grow the film to the desired thickness. The high quality of the resulting films will allow them to be used as templates for further epitaxial deposition of other applied materials.

Copyright

References

Hide All
1.Bauer, E. and Poppa, H., Thin Solid Films 12, 167 (1972).
2.Matthews, J. W., Epitaxial Growth, Part B (Academic, New York, 1975).
3.Rhüle, M., Evans, A., Ashby, M. F., and Hirth, J. P., Metal-Ceramic Interfaces (Pergamon Press, Oxford, 1990).
4.Honjo, G. and Yagi, K., J. Vac. Sci. Technol. 6, 576 (1969).
5.Sato, H. and Shinozaki, S., J. Vac. Sci. Technol. 8, 159 (1971).
6.Sato, H., Shinozaki, S., and Cicotte, L. J., J. Vac. Sci. Technol. 7, 62 (1969).
7.Green, A. K., Dancy, J., and Bauer, E., J. Vac. Sci. Technol. 7, 159 (1970).
8.Guénard, P., Renaud, G., and Villette, B., Phys. B. 221, 205 (1996).
9.Carter, A. C., Horwitz, J. S., Chrisey, D. B., Pond, J. M., Kirchoefer, S. W., and Chang, W., Proceedings of 1997 International Symposium on Integrated Ferroelectrics, 2–5 March 1997, Santa Fe, NM.
10.Grabowski, K. S., Horwitz, J. S., and Chrisey, D. B., Ferroelectr. 116, 19 (1991).
11.Leuchtner, R. E., Chrisey, D. B., Horwitz, J. S., and Grabowski, K. S., Surf. Coat. Technol, 51, 476 (1992).
12.Cillessen, J. F. M., Wolf, R. M., and DeLeeuw, D. M., Thin Solid Films 226, 53 (1993).
13.Wolf, S. A., Qadri, S. B., Claassen, J. H., Francavilla, T. L., and Dalrymple, B. J., J. Vac. Sci. Technol. A 4, 524 (1986).
14.Qadri, S. B., Goldenberg, M., Prinz, G. A., and Ferrari, J. M., J. Vac. Sci. Technol. B 3, 718 (1985).
15.Suzuki, Y., Kikuchi, H., and Koshizuka, N., Jpn. J. Appl. Phys. 27, L1175 (1988).
16.Elliott, W. C., Miceli, P. F., Tse, T., and Stephens, P. W., Phys. Rev. B 54, 17 933 (1996).

Micron thick epitaxial (100) Ag film growth on MgO

  • A. C. Carter (a1), W. Chang (a1), S. B. Qadri (a1), J. S. Horwitz (a1), Robert Leuchtner (a1) and D. B. Chrisey (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.