Skip to main content Accessibility help

Mechanical properties and microstructures of metal/ceramic microlaminates: Part II. A Mo/Al2O3 system

  • T.C. Chou (a1), T.G. Nieh (a1), S.D. McAdams (a2), G.M. Pharr (a2) and W.C. Oliver (a3)...


Synthetic multilayers consisting of periodic layers of the refractory metal Mo and the oxide ceramic Al2O3 have been produced by alternating d.c. and r.f. reactive sputter deposition. Microlaminates with four different modulation wavelength—5, 20, 30, and 100 nm—were investigated in this study. The compositions, periodicities, and microstructures of the microlaminates were characterized by Auger electron spectroscopy, low-angle x-ray diffraction, and transmission electron microscopy, including high resolution lattice imaging and microdiffraction. Transmission electron microscopy from the microlaminates indicated that the as-deposited Mo layers are polycrystalline, while the as-deposited Al2O3 layers are primarily amorphous. The Mo and Al2O3 layers are thermally compatible at 800 °C for 6 h, showing no evidence of atomic interdiffusion between the layers. The mechanical properties of the microlaminates, as well as those of monolithic films of Mo and Al2O3 (i.e., the baseline materials), were investigated using nanoindentation methods. A higher than expected modulus and hardness were observed for the microlaminate with the longest wavelength (100 nm); otherwise the mechanical properties are explainable by a rule-of-mixtures. The enhanced mechanical properties of the 100 nm microlaminate may be attributed to crystallization of the amorphous Al2O3 layers and the evolution of a structural texture within this phase.



Hide All
1Schuller, I. K., Fartash, A., and Grimsditch, M., Elastic Anomalies in Superlattices, 33-37, Interfaces part II, MRS Bulletin, October 1990.
2McWhan, D. B., Synthetic Modulated Structures, edited by Chang, L. L. and Giesser, B.C. (Academic Press, New York, 1985), p. 43.
3Sato, N., J. Appl. Phys. 59, 2514 (1986).
4Falco, C. M. and Schuller, I. K., Synthetic Modulated Structures (Academic Press, New York, 1985), p. 339.
5Barbee, T. W., Proc. Soc. Photo-opt. Instrum. Eng. 563, 2 (1985).
6Spiller, E., AIP Conf. Proc. 75, 12 (1981).
7Tsakalakos, T. and Hilliard, J.E., J. Appl. Phys. 54, 734 (1983).
8Yang, W. M. C., Tsakalakos, T., and Hilliard, J. E., J. Appl. Phys. 48, 876 (1977).
9Cammarata, R. C., Schlesinger, T. E., Kim, C., Qadri, S. B., and Edelstein, A. S., Appl. Phys. Lett. 56, 1862 (1990).
10Schuller, I. K. and Grimsditch, M., J. Vac. Sci. Technol. B4, 1444 (1986).
11Fartash, A., Fullerton, E. E., Schuller, I. K., Bobbin, S.E., Wagner, J.W., Cammarata, R. C., Kumar, S., and Grimsditch, M., Phys. Rev. B 44, 13760 (1991).
12Clemens, B. and Eesley, G., Phys. Rev. Lett. 61, 2356 (1988).
13Khan, R., Chun, C.S.L., Pelcher, G.P., Grimsditch, M., Kueny, A., Falco, C. M., and Schuller, I. K., Phys. Rev. B 27, 7186 (1983).
14Doerner, M. F., Ph.D. Dissertation (Stanford University, 1987).
15Helmersson, U., Todorova, S., Barnett, S. A., Sundgren, J-E., Markert, L. C., and Greene, J. E., J. Appl. Phys. 62, 481 (1987).
16Cammarata, R. C., Scripta Metall. 20, 479 (1986).
17Baumann, T., Pethica, J. B., Grimsditch, M., and Schuller, I. K., in Interfaces, Superlattices, and Thin Films, edited by Dow, J. D. and Schuller, I. K. (Mater. Res. Soc. Symp. Proc. 77, Pittsburgh, PA, 1987), p. 527.
18Baker, S. P., Jankowski, A. F., Hong, S., and Nix, W. C., Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W. C., Pharr, G. M., and Brotzen, F.R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 289.
19Davis, B. M., Seidman, D.N., Moreau, A., Ketterson, J.B., Mattson, J., and Grimsditch, M., Phys. Rev. B 43, 9304 (1991).
20Chou, T. C., Nieh, T. G., Tsui, T. Y., Pharr, G. M., and Oliver, W. C., J. Mater. Res. 7, 2765 (1992).
21McAdams, S.D., M.S. Thesis (Rice University, 1991).
22Chou, T. C., Adamson, D., Mardinly, J., and Nieh, T. G., Thin Solid Films 205, 131 (1991).
23Chou, T. C. and Nieh, T. G., J. Am. Ceram. Soc. 74, 2270 (1991).
24Petford-Long, A. K., Stearns, M. B., Chang, C. H., Nutt, S. R., Stearns, D. G., Ceglio, N.M., and Hawryluk, A.M., J. Appl. Phys. 61, 1422 (1987).
25Sheppard, L.M., Ceram. Bull. 70, 1467 (1991).
26Oliver, W. C. and Pharr, G. M., J. Mater. Res. 7, 1564 (1992).
27Stone, D., LaFontaine, W. R., Alexopoulos, P., Wu, T-W., and Li, C-Y., J. Mater. Res. 3, 141 (1988).
28Guivarc'h, A., Auvray, P., Cun, L. Le, Boulet, J.P., Pelous, G., and Martinez, A., J. Appl. Phys. 49, 233 (1978).
29Nava, F., Majni, G., Cantoni, P., Pignatel, G., Ferla, G., Cappelletti, P., and Mori, F., Thin Solid Films 94, 59 (1982).
30Suzuki, S., Ohkubo, Y., Matsuoka, F., and Itoh, T., Appl. Phys. Lett. 42, 797 (1983).
31Oliver, W. C. and McHargue, C.J., Thin Solid Films 161, 117 (1988).
32Chou, T. C. and Nieh, T. G., Thin Solid Films (in press).
33Han, Y.H., Li, H., Wong, T.Y., and Bradt, R.C ., J. Am. Ceram. Soc. 74, 3129 (1991).
34Brooks, C.A., O'Neill, J.B., and Redfern, B.A.W., Proc. R. Soc. London A 322, 73 (1971).
35Lin, T., Alani, R., and Lambeth, D. N., J. Magnetism and Magnetica Mat. 78, 213 (1989).

Mechanical properties and microstructures of metal/ceramic microlaminates: Part II. A Mo/Al2O3 system

  • T.C. Chou (a1), T.G. Nieh (a1), S.D. McAdams (a2), G.M. Pharr (a2) and W.C. Oliver (a3)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed