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Mechanical properties and microstructures of metal/ceramic microlaminates: Part I. Nb/MoSi2 systems

  • T.C. Chou (a1), T.G. Nieh (a1), T.Y. Tsui (a2), G.M. Pharr (a2) and W.C. Oliver (a3)...

Abstract

Artificial multilayers, or microlaminates, composed of alternating layers of Nb and MoSi2 of equal thickness were synthesized by d.c., magnetron sputtering. Four different modulation wavelengths, λ, were studied: 7, 11, 20, and 100 nm. The compositions, periodicities, and microstructures of the microlaminates were characterized by Auger electron spectroscopy and transmission electron microscopy. Structural characterization revealed that the as-deposited Nb layers are polycrystalline, while the MoSi2 layers are amorphous. The hardnesses and elastic moduli of the films were measured using nanoindentation techniques. Neither a supermodulus nor a superhardness effect could be identified in the range of wavelengths investigated; for each of the microlaminates, both the hardness and modulus were found to fall between the bounds set by the properties of the monolithic Nb and MoSi2 films. Nevertheless, a modest but a measurable increase in both hardness and modulus with decreasing wavelength was observed, thus indicating that behavior cannot be entirely described by a simple rule-of-mixtures. The hardness was found to vary linearly with Δ−1/2 in a manner similar to the Hall–Petch relationship. Annealing the microlaminates at 800 °C for 90 min produces significant increases in hardness and modulus due to chemical interaction of the layers.

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1Schuller, I. K., Fartash, A., and Grimsditch, M., Elastic Anomalies in Superlattices, 33-37, Interfaces part II, MRS Bulletin, October 1990.
2McWhan, D. B., Synthetic Modulated Structures, edited by Chang, L. L. and Giesser, B.C. (Academic Press, New York, 1985), p. 43.
3Sato, N., J. Appl. Phys. 59, 2514 (1986).
4Falco, C. M. and Schuller, I. K., Synthetic Modulated Structures (Academic Press, New York, 1985), p. 339.
5Barbee, T.W., Proc. Soc. Photo-opt. Instrum. Eng. 563, 2 (1985).
6Spiller, E., AIP Conf. Proc. 75, 12 (1981).
7Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 54, 734 (1983).
8Cammarata, R. C., Schlesinger, T. E., Kim, C., Qadri, S. B., and Edelstein, A. S., Appl. Phys. Lett. 56, 1862 (1990).
9Yang, W. M. C., Tsakalakos, T., and Hilliard, J. E., J. Appl. Phys. 48, 876 (1977).
10Schuller, I. K. and Grimsditch, M., J. Vac. Sci. Technol. B4, 1444 (1986).
11Fartash, A., Fullerton, E.E., Schuller, I. K., Bobbin, S.E., Wagner, R.W., Cammarata, J. C., Kumar, S., and Grimsditch, M., Phys. Rev. B 44, 13760 (1991).
12Clemens, B. and Eesley, G., Phys. Rev. Lett. 61, 2356 (1988).
13Khan, R., Chun, C. S. L., Felcher, G. P., Grimsditch, M., Kueny, A., Falco, C. M., and Schuller, I. K., Phys. Rev. B 27, 7186 (1983).
14Doerner, M. F., Ph.D. Dissertation (Stanford University, 1987).
15“Research Opportunities for Materials with Ultrafine Micro-structures,” National Research Council (NMAB-454, National Academy Press, Defense Technical Information Center, Cameron Station, Alexandria, VA 22304-6145, 1987), p. 78.
16Helmersson, U., Todorova, S., Barnett, S.A., Sundgren, J-E., Markert, L. C., and Greene, J.E., J. Appl. Phys. 62, 481 (1987).
17Tsakalakos, T. and Jankowski, A. F., Annu. Rev. Mater. Sci. 16, 293 (1986).
18Jankowski, A. F. and Tsakalakos, T., J. Phys. F 15, 1279 (1985).
19Cammarata, R. C. and Sieradzki, K., Phys. Rev. Lett. 62, 2005 (1989).
20Wu, T.B., J. Appl. Phys. 53, 5265 (1982).
21Pickett, W.E., J. Phys. F 12, 2195 (1982).
22Banerjea, A. and Smith, J. R., Phys. Rev. B 35, 5413 (1987).
23Huberman, M. L. and Grimsditch, M., Phys. Rev. Lett. 62, 1403 (1989).
24Cammarata, R. C., Scripta Metall. 20, 479 (1986).
25Baumann, T., Pethica, J.B., Grimsditch, M., and Schuller, I.K., in Interfaces, Superlattices, and Thin Films, edited by Dow, J. D. and Schuller, I. K. (Mater. Res. Soc. Symp. Proc. 77, Pittsburgh, PA, 1987), p. 527.
26Berry, B. S. and Pritchet, W. C., Thin Solid Films 33, 191 (1976).
27Testardi, L. R., Willens, R. M., Krause, J. T., McWhan, D. B., and Nakahara, S., J. Appl. Phys. 52, 510 (1981).
28Mattson, J., Bhadra, R., Ketterson, J.B., Brodsky, M.B., and Grimsditch, M., J. Appl. Phys. 67, 2873 (1990).
29Baker, S.P., Jankowski, A.F., Hong, S., and Nix, W.D, in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W.C., Pharr, G.M., and Brotzen, F.R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 289.
30Davis, B.M., Seidman, D.N., Moreau, A., Ketterson, J.B., Mattson, J., and Grimsditch, M., Phys. Rev. B 43, 9304 (1991).
31Lehoczky, S.L., J. Appl. Phys. 49, 5479 (1978).
32Tench, D. and White, J., Metall. Trans. 15A, 2039 (1984).
33Bunshah, R. F., Nimmagadda, R., Doerr, H. J., Movchan, B. A., Grechanuk, N. I., and Dabizha, E. V., Thin Solid Films 72, 261 (1980).
34Bunshah, R. F., Nimmagadda, R., Doerr, H. J., Movchan, B. A., Grechanuk, N. I., and Didkin, G. G., Thin Solid Films 112, 227 (1984).
35Sans, C., Deshpandey, C., Doerr, H.J., Bunshah, R.F., Movchan, B.A., and Demchishin, A. V., Thin Solid Films 107, 345 (1983).
36Parker, C.A., Metall. Trans. 16A, 1693 (1985).
37Nieh, T. G. and Wadsworth, J., Scripta Met. et Mat. 25, 955 (1991).
38McAdams, S.D., M.S. Thesis (Rice University, 1991).
39Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).
40Hardness Testing, edited by Boyer, H. E. (ASM INTERNATIONAL, Metals Park, OH, 1987).
41Chou, T. C. and Nieh, T.G., Thin Solid Films (in press).
42Lynch, J. F., Ruderer, C. G., and Duckworth, W. H., “Engineering Properties of Ceramics,” Technical Report Air Force Materials Laboratory (AFML)-TR-66-52 (Defense Documentation Center, Cameron Station, Alexandria, VA, 1967), p. 5.7.35.
43Nakamura, M., Matsumoto, S., and Hirano, T., J. Mater. Sci. 25, 3309 (1990).
44Fitzer, E. and Kehr, D., Thin Solid Films 39, 55 (1976).
45Fitzer, E. and Remmele, W., Proc. 5th Int. Conf. on Composite Materials ICCM-V (TMS, Warrendale, PA, 1985), p. 515.
46Lu, T. C., Evans, A. G., Hecht, R. J., and Mehrabian, R., Acta Metall. 39, 1853 (1991).

Mechanical properties and microstructures of metal/ceramic microlaminates: Part I. Nb/MoSi2 systems

  • T.C. Chou (a1), T.G. Nieh (a1), T.Y. Tsui (a2), G.M. Pharr (a2) and W.C. Oliver (a3)...

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