Skip to main content Accessibility help
×
Home

Measurement of Young’s modulus of anisotropic materials using microcompression testing

  • In-suk Choi (a1), Yixiang Gan (a2), Daniel Kaufmann (a3), Oliver Kraft (a3) and Ruth Schwaiger (a3)...

Abstract

Microcompression test was applied to determine the Young’s modulus for elastically anisotropic materials for two different orientations of single crystalline Si. Although there is a clear difference in the apparent Young’s moduli for the different orientations, a significant underestimation of Young’s modulus was observed resulting from the substrate deformation as observed in both finite element simulation and experiment. This effect decreases with increasing aspect ratio. To correct the deviation of the apparent Young’s modulus from the theoretical values, a systematic framework of microcompression test is suggested. The modified Sneddon correction using the indentation modulus instead of Young’s modulus successfully yields Young’s moduli of single crystalline silicon in the [100] and [111] directions to within 5.3% and 2.0% deviation, respectively.

    • Send article to Kindle

      To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

      Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

      Find out more about the Kindle Personal Document Service.

      Measurement of Young’s modulus of anisotropic materials using microcompression testing
      Available formats
      ×

      Send article to Dropbox

      To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

      Measurement of Young’s modulus of anisotropic materials using microcompression testing
      Available formats
      ×

      Send article to Google Drive

      To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

      Measurement of Young’s modulus of anisotropic materials using microcompression testing
      Available formats
      ×

Copyright

Corresponding author

a)Address all correspondence to this author. e-mail: insukchoi@kist.kr

References

Hide All
1.Oliver, W.C. and Pharr, G.M.: Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J. Mater. Res. 19, 3 (2004).
2.Vlassak, J.J. and Nix, W.D.: Measuring the elastic properties of anisotropic materials by means of indentation experiments. J. Mech. Phys. Solids 42, 1223 (1994).
3.Vlassak, J.J., Ciavarella, M., Barber, J.R., and Wang, X.: The indentation modulus of elastically anisotropic materials for indenters of arbitrary shape. J. Mech. Phys. Solids 51, 1701 (2003).
4.Uchic, M.D., Dimiduk, D.M., Florando, J.N., and Nix, W.D.: Sample dimensions influence strength and crystal plasticity. Science 304, 986 (2004).
5.Greer, J.R. and De Hosson, J.T.M.: Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect. Prog. Mater Sci. 56, 654 (2011).
6.Kraft, O., Gruber, P., Mönig, R., and Weygand, D.: Plasticity in confined dimensions. Annu. Rev. Mater. Res. 40, 8.18.25 (2010).
7.Volkert, C.A. and Lilleodden, E.T.: Size effects in the deformation of sub-micron Au columns. Philos. Mag. 86, 5567 (2006).
8.Volkert, C.A., Donohue, A., and Spaepen, F.: Effect of sample size on deformation in amorphous metals. J. Appl. Phys. 103, 083539 (2008).
9.Kiener, D., Motz, C., and Dehm, G.: Micro-compression testing: A critical discussion of experimental constraints. Mater. Sci. Eng., A 505, 79 (2009).
10.Zhang, H., Schuster, B.E., Wei, Q., and Ramesh, K.T.: The design of accurate microcompression experiments. Scr. Mater. 54, 181 (2006).
11.Choi, Y.S., Uchic, M.D., Parthasarathy, T.A., and Dimiduk, D.M.: Numerical study on microcompression tests of anisotropic single crystals. Scr. Mater. 57, 849 (2007).
12.Moser, B., Wasmer, K., Barbieri, L., and Michler, J.: Strength and fracture of Si micropillars: A new scanning electron microscopy-based micro-compression test. J. Mater. Res. 22, 1004 (2007).
13.Sneddon, I.N.: The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile. Int. J. Eng. Sci. 3, 47 (1965).
14.Greer, J.R., Oliver, W.C., and Nix, W.D.: Size dependence of mechanical properties of gold at the micron scale in the absence of strain gradients. Acta Mater. 53(6), 1821 (2005); Corrigendum. Acta Mater. 54(6), 1705 (2006).
15.Brantley, W.A.: Calculated elastic constants for stress problems associated with semiconductor devices. J. Appl. Phys. 44, 534 (1973).
16.Schwaiger, R., Weber, M., Moser, B., Gumbsch, P., and Kraft, O.: Mechanical assessment of ultrafine-grained nickel by microcompression experiment and finite element simulation. J. Mater. Res. 27(1), 266 (2012).
17.Yang, Y., Ye, J.C., Lu, J., Liu, F.X., and Liaw, P.K.: Effects of specimen geometry and base material on the mechanical behavior of focused-ion-beam-fabricated metallic-glass micropillars. Acta Mater. 57, 1613 (2009).
18.Ballato, A.: Poisson’s ratio for tetragonal, hexagonal, and cubic crystals. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 43, 56 (1996).
19.Franca, D.R. and Blouin, A.: All-optical measurement of in-plane and out-of-plane Young’s modulus and Poisson’s ratio in silicon wafers by means of vibration modes. Meas. Sci. Technol. 15, 859 (2004).
20.Kailer, A., Nickel, K.G., and Gogotsi, Y.G.: Raman microspectroscopy of nanocrystalline and amorphous phases in hardness indentations. J. Raman Spectrosc. 30, 939 (1999).
21.Domnich, V. and Gogotsi, Y.: Phase transformation in silicon under contact loading. Rev. Adv. Mater. Sci. 3, 1 (2002).
22.Jang, J., Lance, M.J., Wen, S., Tsui, T.Y., and Pharr, G.M.: Indentation-induced phase transformations in silicon: Influences of load, rate and indenter angle on the transformation behavior. Acta Mater. 53, 1759 (2005).
23.Bolshakov, A. and Pharr, G.M.: Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques. J. Mater. Res. 13, 4 (1998).

Measurement of Young’s modulus of anisotropic materials using microcompression testing

  • In-suk Choi (a1), Yixiang Gan (a2), Daniel Kaufmann (a3), Oliver Kraft (a3) and Ruth Schwaiger (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed