Skip to main content Accessibility help
×
Home

Low temperature solid-state epitaxy of LiNbO3 films by a dipping-pyrolysis process using Li-trifluoroacetate

  • T. Manabe (a1), I. Yamaguchi (a1), W. Kondo (a1), T. Kumagai (a1) and S. Mizuta (a1)...

Abstract

Epitaxially grown LiNbO3 thin films were prepared on sapphire(012) (R-plane) substrates by a dipping-pyrolysis process using two kinds of lithium sources, i.e., Li-2-ethylhexanoate and Li-trifluoroacetate, which are pyrolyzed in air to Li2CO3 and LiF, respectively. Crystallization temperature and alignment of LiNbO3 films on sapphire(012) were found to depend greatly on the Li sources. Dominantly [100]-oriented epitaxial LiNbO3 films were crystallized at around 600 °C using 2-ethylhexanoate, whereas dominantly [012]-oriented epitaxial LiNbO3 films resulted at a temperature as low as 400 °C using trifluoroacetate.

Copyright

References

Hide All
1.Nashimoto, K. and Cima, M. J., Mater. Lett. 10, 348 (1991).
2.Terabe, K., Iyi, N., Kitamura, K., and Kimura, S., J. Mater. Res. 10, 1779 (1995).
3.Hirano, S., Yogo, T., Kikuta, K., Sakamoto, W., and Takeuchi, Y., Mater. Sci. Eng. B41, 117 (1996).
4.Manabe, T., Kim, S., Yamaguchi, I., Kumagai, T., and Mizuta, S., J. Natl. Inst. Mater. & Chem. Res. 4, 153 (1996) (in Japanese).
5.Manabe, T., Kim, S., Yamaguchi, I., Mizuta, S., and Kumagai, T., Trans. Mater. Res. Soc. Jpn. 20, 599 (1996).
6.Gupta, A., Jagannathan, R., Cooper, E. I., Geiss, E. A., Landman, J. I., and Hussey, B. W., Appl. Phys. Lett. 52, 2077 (1988).
7.Fujimura, N., Kakinoki, M., Tsuboi, H., and Ito, T., J. Appl. Phys. 75, 2169 (1994).

Low temperature solid-state epitaxy of LiNbO3 films by a dipping-pyrolysis process using Li-trifluoroacetate

  • T. Manabe (a1), I. Yamaguchi (a1), W. Kondo (a1), T. Kumagai (a1) and S. Mizuta (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed