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Hole pattern formation in unfired ceramic sheets by pulsed Nd:YAG laser

Published online by Cambridge University Press:  31 January 2011

Rong-Fuh Louh  and
Relva C. Buchanan
Rong-Fuh Louh
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Relva C. Buchanan
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
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Abstract

Single shot pulses from a Nd:YAG laser have been used to generate different sized holes and patterns in unfired ceramic sheets for electronic packaging applications. The single shot laser pulses were targeted using a computer controlled deflection system and a programmed pattern. With changes in pulse energy level and profile, the laser beam was also used to sinter line patterns in deposited thin and thick films. The surface radial temperature profile resulting from the laser pulse interaction was also directly mapped using a lacquer thermocoat. Effects of the laser pulse energy and beam spot size on laser/ceramic interactions, morphology, and structure of the drilled holes before and after sintering were examined by SEM. High quality hole patterns (of ∼100 μm hole size) were produced in unfired 100 μm thick ceramic sheets up to 100 μm thick using single shot of laser irradiation with 8 mJ pulse energy and 18 nsec pulse duration.

Type
Articles
Information
Journal of Materials Research , Volume 5 , Issue 4 , April 1990 , pp. 841 - 846
Copyright
Copyright © Materials Research Society 1990

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