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Frequency-dependent electromechanical properties for sol-gel deposited ferroelectric lead zirconate titanate thin layers: Thickness and processing effects

Published online by Cambridge University Press:  03 March 2011

Jie-Fang Li ,
Dwight Viehland ,
C.D.E. Lakeman  and
D.A. Payne
Jie-Fang Li
Affiliation:
Department of Materials Science and Engineering, Seitz Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Dwight Viehland
Affiliation:
Department of Materials Science and Engineering, Seitz Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
C.D.E. Lakeman
Affiliation:
Department of Materials Science and Engineering, Seitz Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
D.A. Payne
Affiliation:
Department of Materials Science and Engineering, Seitz Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
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Abstract

The electromechanical properties of sol-gel-derived ferroelectric Pb(Zr0.53Ti0.47)O3 (PZT 53/47) thin layers deposited on silicon were determined as a function of field strength, measurement frequency, and total thickness. Both electrically induced strains (∊) and piezoelectric properties (d33) were characterized by interferometry. Dielectric spectroscopy and polarization switching (P-E) measurements were determined for comparative purposes. An asymmetry between forward and the reverse bias conditions in the ∊-E displacements was found for both five-layer deposited and nine-layer deposited structures. However, no asymmetry was observed in the P-E hysteresis characteristics. In addition, the electrically induced strains and the piezoelectric response were found to be dependent on measurement frequency. No significant frequency dependence was observed in the polarization or dielectric responses. The results are discussed in terms of a possible clamping effect on polarization switching.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 6 , June 1995 , pp. 1435 - 1440
Copyright
Copyright © Materials Research Society 1995

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References

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