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Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

  • Ching-Jung Yang (a1), Chih Chen (a1), Pu-Wei Wu (a1), Jia-Min Shieh (a2), Shun-Min Wang (a1) and Shih-Wei Liang (a1)...

Abstract

Ordered arrays of Ta2O5 nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 μm) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta2O5. X-ray diffraction demonstrated the amorphous characteristic of Ta2O5. As shown in field-emission scanning electron microscopy and transmission electron results, the Ta2O5 nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.

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Corresponding author

a) Address all correspondence to this author. e-mail: chih@cc.nctu.edu.tw

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Keywords

Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

  • Ching-Jung Yang (a1), Chih Chen (a1), Pu-Wei Wu (a1), Jia-Min Shieh (a2), Shun-Min Wang (a1) and Shih-Wei Liang (a1)...

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