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Extracting the elastic moduli of the constituent layers of a multilayered thin film from nanoindentation tests

  • Chunyu Zhang (a1), Meng Zhao (a2), Yulan Liu (a2) and Biao Wang (a3)

Abstract

Multilayer thin films have been widely used for their enhanced mechanical and tribological properties relative to the monolayers of equivalent thickness. However, the mechanical properties of the each constituent layer are rarely investigated due to the difficulty in separating the effects of the constituent layers. An inverse analysis method to identify the elastic moduli of the constituent layers of multilayer films is developed by fitting the finite element calculations with indentation measurements within the framework of numerical optimization. The method is verified against typical monolayer, bilayer, and trilayer film structures both numerically and experimentally. Uniqueness and substrate-independence of the extracted moduli are ensured by the multiple loading–unloading cycles of the indentation tests. The method provides a feasible way to characterize the intrinsic mechanical properties of the constituent layers of multilayered thin films and further to explore the dominant mechanism for the enhancement of their mechanical properties.

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Corresponding author

a)Address all correspondence to this author. e-mail: wangbiao@mail.sysu.edu.cn

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1.Molina-Aldareguia, M., Lloyd, S.J., Oden, S.J., Joelsson, T., Hultman, L., and Clegg, W.J.: Deformation structures under indentations in TiN/NbN single-crystal multilayers deposited by magnetron sputtering at different bombarding ion energies. Philos. Mag. A 82, 19831992 (2002).
2.Kang, B.C., Kim, H.Y., Kwon, O.Y., and Hong, S.H.: Bilayer thickness effects on nanoindentation behavior of Ag/Ni multilayers. Scr. Mater. 57, 703706 (2007).
3.Yu, H.Y., Sanday, S.C., and Rath, B.B.: The effect of substrate on the elastic properties of films determined by the indentation test—axisymmetrical boussinesq problem. J. Mech. Phys. Solids 38, 745764 (1990).
4.Gao, H., Chiu, C.H., and Lee, J.: Elastic contact versus indentation modeling of multi-layered materials. Int. J. Solids Struct. 29, 24712492 (1992).
5.Mencik, J., Munz, D., Quandt, E., Weppelmann, E.R., and Swain, M.V.: Determination of elastic modulus of thin layer using nano-indentation. J. Mater. Res. 12, 24752484 (1997).
6.Saha, R. and Nix, W.D.: Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Mater. 50, 2338 (2002).
7.Zhang, C.Y., Zhang, Y.W., and Zeng, K.Y.: Extracting the mechanical properties of a viscoelastic polymeric film on a hard elastic substrate. J. Mater. Res. 19, 30533061 (2004).
8.Antunes, J.M., Fernandes, J.V., Sakharova, N.A., Oliveira, M.C., and Menezes, L.F.: On the determination of the Young’s modulus of thin films using indentation tests. Int. J. Solids Struct. 44, 83138334 (2007).
9.Tricoteaux, A., Duarte, G., Chicot, D., Le Bourhis, E., Bemporad, E., and Lesage, J.: Depth-sensing indentation modeling for determination of elastic modulus of thin films. Mech. Mater. 42, 166174 (2010).
10.Li, H., Randall, N.X., and Vlassak, J.J.: New methods of analyzing indentation experiments on very thin films. J. Mater. Res. 25, 728734 (2010).
11.Hay, J. and Crawford, B.: Measuring substrate-independent modulus of thin films. J. Mater. Res. 26, 727738 (2011).
12.Chima-Okereke, C., Bushby, A.J., Reece, M.J., Whatmore, R.W., and Zhang, Q.: Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers. J. Mater. Res. 21, 409419 (2006).
13.Peyrot, I., Bouchard, P-O., Ghisleni, R., and Michler, J.: Determination of plastic properties of metals by instrumented indentation using a stochastic optimization algorithm. J. Mater. Res. 24, 936947 (2008).
14.Rauchs, G. and Bardo, J.: Identification of elasto-viscoplastic material parameters by indentation testing and combined finite element modelling and numerical optimization. Finite Elem. Anal. Des. 47, 653667 (2011).
15.Hamasaki, H., Shinbat, K., and Yoshida, F.: Viscoplastic parameter identification for lead-free solder alloy by micro-indentation, FE simulation and optimization. Mater. Trans. 49, 532537 (2008).
16.Karimpour, M., Balint, D.S., Rzepiejewska-Malyska, K.A., Szerling, A., Michler, J., and Lin, J.: An inverse method for extracting the mechanical properties of the constituent materials of a multilayer from nanoindentation data. Comp. Mater. Sci. 68, 384390 (2013).
17.Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 15641583 (1992).
18.Doerner, M.F. and Nix, W.D.: A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1, 601609 (1986).
19.Levenberg, K.: A method for the solution of certain nonlinear problems in least squares. Q. Appl. Math. 2, 164166 (1944).
20.Marquardt, D.W.: An algorithm for least-squares estimation of nonlinear inequalities. SIAM J. Appl. Math. 11, 431441 (1963).
21.Luo, J. and Lin, J.: A study on the determination of plastic properties of metals by instrumented indentation using two sharp indenters. Int. J. Solids Struct. 44, 58035817 (2007).
22.Code-Aster, A multi-physics finite element code for structural mechanics, http://www.code-aster.org/, V10.3, 2012.
23.Shang, S.H., Yang, P., and Li, C.: Nanoindentation experiment of W/Al bilayer-film system and its finite element simulation. Electron. Compon. Mater. 28, 6063 (2009) [in Chinese].

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Extracting the elastic moduli of the constituent layers of a multilayered thin film from nanoindentation tests

  • Chunyu Zhang (a1), Meng Zhao (a2), Yulan Liu (a2) and Biao Wang (a3)

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