Skip to main content Accessibility help
×
Home

Experimental and theoretical characterization of the surface acoustic wave propagation properties of GaN epitaxial layers on c-plane sapphire

  • Kook Hyun Choi (a1), Hyeong Joon (a1), Su Jin Chung (a1), Jin Yong Kim (a2), Tae Kun Lee (a3) and Young Jin Kim (a4)...

Abstract

Surface acoustic wave (SAW) propagation properties of gallium nitride (GaN) epitaxial layers on sapphire were theoretically and experimentally characterized. GaN thin films were grown on a c-plane sapphire substrate using a metalorganic chemical vapor deposition system. The experimental characterization of SAW propagation properties was performed with a linear array of interdigital transducer structures, while SAW velocities were calculated by matrix methods. Experimentally, we found pseudo-SAW and high-velocity pseudo-SAW modes in the GaN/sapphire structure, which had a good agreement with calculated velocities.

Copyright

References

Hide All
1.Nakahata, H., Higaki, K., Hachico, A., Shikata, S., Fujimori, N., Takahashi, Y., Kajihara, T., and Yamamoto, Y., Jpn. J. Appl. Phys. Pt. 1 33, 324 (1994).
2.O’Clock, G.D. and Duffy, M.T., Appl. Phys. Lett. 23, 55 (1973).
3.Didenko, I.S., Hickernell, F.S., and Naumenko, N.F., IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 47, 179 (2000).
4.Polian, A., Grimditch, M., and Grzegory, I., J. Appl. Phys. 79, 3343 (1996).
5.Schwarz, R.B., Khachataryan, K., and Weber, R.E., Appl. Phys. Lett. 70, 1122 (1997).
6.Deger, C., Born, E., Angerer, H., Ambacher, O., Stutzmann, M., Hormstein, J., Riha, E., and Fischeruer, G., Appl. Phys. Lett. 72, 2400 (1998).
7.Yamaguchi, M., Yagi, T., Azuhata, T., Sato, T., Suzuki, K., Chichibu, S., and Nakamura, S., J. Appl. Phys. 86, 1860 (1999).
8.Deduchi, T., Ichiryu, D., Toshikawa, K., Sekiguchi, K., Sato, T., Matsuo, R., Azuhata, T., Yamaguchi, M., Yagi, T., Chichibu, S., and Nakamura, S., J. Appl. Phys. 86, 1860 (1999).
9.Kim, K., Lambrecht, W.R.L., and Segall, B., Phys. Rev. B 53, 16310 (1996); 53, 7018 (1997).
10.Wright, A.F., J. Appl. Phys. 82, 2833 (1997).
11.Shimada, K., Sato, T., and Suzuki, K., J. Appl. Phys. 84, 4951 (1998).
12.Farnell, G.W. and Adler, E.L., in Physical Acoustics, edited by Thurston, R.N. and Mason, W.P. (Academic Press, New York, 1972), Vol. IX, pp. 35127.
13.Adler, E.L., Slaboszewicz, J.K., Farnell, G.W., and Jen, C.K., IEEE Trans. Ultrason. Ferroelectr. and Freq. Contr. 37, 215 (1990).
14.Guy, I.L., Muensit, S., and Goldys, E.M., Appl. Phys. Lett. 75, 4133 (1999).
15.Muensit, S.Goldys, E.M., and Guy, I.L., Appl. Phys. Lett. 75, 3965 (1999).
16.Barker, A.S., Jr. and Ilegems, M., Phys. Rev. B 7, 743 (1973).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed