Skip to main content Accessibility help
×
Home

Epitaxial growth of sol-gel PLZT thin films

  • Dae Sung Yoon (a1), Chang Jung Kim (a1), Joon Sung Lee (a1), Won Jong Lee (a2) and Kwangsoo No (a1)...

Abstract

Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)] thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 °C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(100), and the sapphire (0112) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.

Copyright

References

Hide All
1Yi, G., Wu, Z., and Sayer, M., J. Appl. Phys. 64, 2717 (1988).
2Vest, R. W. and Wu, J., Ferroelectrics 93, 21 (1989).
3Land, C. E., J. Am. Ceram. Soc. 71, 905 (1988).
4Peng, C. H., Chang, J., and Desu, S. B., in Ferroelectric Thin Films II, edited by Kingon, A. I., Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992), p. 21.
5Borrelli, P. J., Ballentine, P. H., and Kadin, A. M., in Ferroelectric Thin Films II, edited by Kingon, A. I., Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992), p. 417.
6Wegner, A. B., Brueck, S. R. J, and Wu, A. Y., Ferroelectrics 116, 195 (1991).
7Kawaguchi, T., Adachi, H., Setsune, K., Yamazaki, O., and Kwasa, K., Appl. Opt. 23, 2187 (1984).
8Paz de Araujo, C. A., McMillan, L. D., Melnick, B. M., Cuchiaro, J. D., and Scott, J. F., Ferroelectrics 104, 241 (1990).
9Baude, P. F., Ye, C., Tamagawa, T., and Polla, D. L., in Ferroelectric Thin Films II, edited by Kingon, A. I., Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992), p. 275.
10Ishida, M., Tsuji, S., Kimura, K., Matsunami, H., and Tanaka, T., J. Cryst. Growth 45, 393 (1978).
11Okuyama, M., Usuki, T., Hamakawa, Y., and Nakagawa, T., Appl. Phys. 21, 339 (1980).
12Baringay, C. K. and Dey, S. K., Appl. Phys. Lett. 61, 1278 (1992).
13Yoon, D. S., Kim, J. M., Ahn, K. C., and No, K., Integrated Ferroelectrics (1993, in press).
14Rou, S. H., Graettinger, T. M., Chow, A. F., Soble, C. N., Lichtenwalner, D. J., Auciello, O., and Kingon, A. I., in Ferroelectric Thin Films II, edited by Kingon, A. I., Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992), p. 81.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed