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Effect of substrate deformation on the microcantilever beam-bending test

  • Tong-Yi Zhang (a1), Ming-Hao Zhao (a1) and Cai-Fu Qian (a1)

Abstract

With regard to substrate deformation, this work analyzed the microcantilever beam-bending test and provided a closed formula of deflection versus load. The substrate deformation was formulated using two coupled springs; the spring compliances were related to the elastic compliances of the substrate, the support angle between the substrate and the microcantilever beam, and the beam thickness. Finite element analysis was conducted to calculate the spring compliances and verify the analytic formula. The results showed that the proportionality factor of the load to the deflection was a third-order polynomial of the length from the loading point to the fixed beam end. Examples are also given to indicate the relative error of Young's modulus when evaluated with the beam-bending theory without considering the substrate deformation.

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Effect of substrate deformation on the microcantilever beam-bending test

  • Tong-Yi Zhang (a1), Ming-Hao Zhao (a1) and Cai-Fu Qian (a1)

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