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Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors

  • Jarrod L. Norton (a1), Gerald L. Liedl (a1) and Elliott B. Slamovich (a1)

Abstract

Metalorganic liquid precursors were used to examine the effects of processing atmosphere on texture development in oriented Pb(Zr0.60Ti0.40)O3 thin films. After removal of organic ligands via pyrolysis, the films were heated at 25 °C/min in a 5% H2/Ar atmosphere until a switching temperature, after which the atmosphere was switched to pure oxygen. The films were heated to a maximum temperature of 650 °C with switching temperatures ranging from 450 to 600 °C. The degree of (111) orientation in the lead zirconate titanate (PZT) films increased with increasing switching temperature, resulting in highly textured (111) PZT films. These results suggest that atmosphere control plays a significant role in texture development during rapid thermal processing.

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1.Scott, J.F. and Paz De Araujo, C.A., Science 246, 1400 (1989).
2.Aoki, K., Fukuda, Y., Numata, K., and Nishimura, A., Jpn. J. Appl. Phys. 33, 5155 (1994).
3.Chen, S.Y. and Chen, I-W., J. Am. Ceram. Soc. 77, 2332 (1994).
4.Chen, S.Y. and Chen, I-W., J. Am. Ceram. Soc. 77, 2337 (1994).
5.Chen, S.Y. and Chen, I-W., J. Am. Ceram. Soc. 81, 97 (1998).
6.Brooks, K.G., Reaney, I.M., Klissurska, R., Huang, Y., Bursill, L., and Setter, N., J. Mater. Res. 9, 2540 (1994).
7.Reaney, I.M., Brooks, K., Klissurska, R., Pawlaczyk, C., and Setter, N., J. Am. Ceram. Soc. 77, 1209 (1994).
8.Tani, T., Xu, Z., and Payne, D.A., in Ferroelectric Thin Films III, edited by Myers, E.R., Tuttle, B.A., Desu, S.B., and Larsen, P.K. (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993), pp. 269274.
9.Hirano, S., Yogo, T., Kikuta, K., Araki, Y., Saitoh, M., and Ogasahara, S., J. Am. Ceram. Soc. 75, 2785 (1992).
10.Tuttle, B.A., Voigt, J.A., Goodnow, D.C., Lamppa, D.L., Headley, T.J., Eatough, M.O., Zender, G., Nasby, R.D., and Rodgers, S.M., J. Am. Ceram. Soc. 76, 1537 (1993).
11.Vest, R.W., in Ceramic Films and Coatings, edited by Wachtman, J.B. and Haber, R.A. (Noyes Publications, Park Ridge, NJ, 1993), pp. 303341.
12.Harris, G.B., Philos. Mag. 43, 113 (1952).
13.Larson, A.C. and von Dreele, R.B., Los Alamos National Laboratory Report LA-UR-86–748 (1986).
14.Ehrlich, S.N., Schwanof, J.A., Yang, X., and Liedl, G.L., Rev. Sci. Instrum. 7, 3369 (1996).
15. International Tables for X-Ray Crystallography, edited by J.A. Ibers and W.C. Hamilton (The Kynoch Press, Birmingham, England, 1974), Vol. IV, pp. 276281.
16. JCPDS-ICDD Powder Diffraction Database, Card 6–574, International Centre for Diffraction Data (1998).
17.Graham, R., Waghorn, G.C.S, and Davies, P.T., Acta Crystallogr. 7, 634 (1954).
18.Pearson's Handbook of Crystallographic Data for Intermetallic Phases (American Society for Metals, Metals Park, OH, 1985), Vol. 3, p. 2988.

Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors

  • Jarrod L. Norton (a1), Gerald L. Liedl (a1) and Elliott B. Slamovich (a1)

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