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Dielectric properties of oxide structures by a laser-based direct-writing method

  • D. Young (a1), H. D. Wu (a1), R. C. Y. Auyeung (a1), R. Modi (a1), J. Fitz-Gerald (a1), A. Pique (a1), D. B. Chrisey (a1), P. Atanassova (a2) and T. Kodas (a2)...

Abstract

Matrix-assisted pulsed laser evaporation direct-write (MAPLE-DW) is a laser-based method of directly writing mesoscopic patterns of electronic materials. Patterns of composite BaTiO3/SiO2/TiO2 dielectric material were written onto Pt/Au interdigitated-electrode test structures, with precise control over final dielectric properties. Scanning electron microscopy indicates random close-packed structures of BaTiO3 and SiO3 particles, with interstitial spaces partially filled with titania. Depending on the BaTiO3:silica ratio, the dielectric constant ranged from 5 to 55 and followed a 4-component logarithmic rule of mixing. This work demonstrates that the transfer process and the final material properties of MAPLE-DW oxide materials are largely decoupled.

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Dielectric properties of oxide structures by a laser-based direct-writing method

  • D. Young (a1), H. D. Wu (a1), R. C. Y. Auyeung (a1), R. Modi (a1), J. Fitz-Gerald (a1), A. Pique (a1), D. B. Chrisey (a1), P. Atanassova (a2) and T. Kodas (a2)...

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