Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-19T21:10:20.212Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of an economical electron backscattering diffraction system for an environmental scanning electron microscope

Published online by Cambridge University Press:  03 March 2011

V. Thaveeprungsriporn ,
J.F. Mansfield  and
G.S. Was
V. Thaveeprungsriporn
Affiliation:
Department of Nuclear Engineering, University of Michigan, Ann Arbor, Michigan 48109
J.F. Mansfield
Affiliation:
North Campus Electron Microbeam Analysis Laboratory, University of Michigan, Ann Arbor, Michigan 48109
G.S. Was
Affiliation:
Department of Nuclear Engineering and Materials Science Engineering, University of Michigan, Ann Arbor, Michigan 48109
Get access

Abstract

A low cost, highly versatile electron backscattering diffraction system has been developed for an ElectroScan E3 Environmental Scanning Electron Microscope (ESEM). A P20 phosphor coated screen is placed in the microscope environment to image electron backscattering diffraction patterns (EBSP's). A CCD TV camera is used to view the patterns through a leaded glass port in the microscope specimen chamber. This system has a spatial resolution approaching 5 μm and yields analyzable patterns at pressures of up to 6 Torr. With minor modifications this system may be adapted to fit any scanning electron microscope. Comparison of analyses of the grain boundary misorientation of a Ni-16Cr-9Fe alloy with this system and by selected area channeling patterns (SACP's), performed in a standard SEM, yielded excellent agreement between the two techniques. Owing to the capability to perform on-line analysis of EBSP's, the EBSP technique required only half the time as the SACP technique. The capabilities of the system are illustrated in a study of the grain boundary character distribution of Ni-16Cr-9Fe following thermomechanical treatment.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 7 , July 1994 , pp. 1887 - 1895
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Watanabe, T., Res. Mech. 11, 47 (1984).Google Scholar
2Randle, V., Microtexture Determination and Its Applications (The Inst. of Materials, London, 1992).Google Scholar
3Davidson, D. L., Int. Met. Rev. 29, 75 (1984).CrossRefGoogle Scholar
4Crawford, D. C., Ph.D. Thesis, The University of Michigan (1991).Google Scholar
5Crawford, D. C. and Was, G. S., J. Electron Microsc. Technique 19, 345 (1991).CrossRefGoogle Scholar
6Farrow, R. C. and Joy, D. C., Scanning Electron Microscopy 1, 397 (1981).Google Scholar
7Ishida, Y., Mori, M., Arimoto, A., and Once, M., Proc. 6th Int. Conf. on Textures of Mater. (IC0T0M-6) (Japanese Iron and Steel Inst., Japan, 1981), Vol. 1, p. 601.Google Scholar
8Newbury, D. and Joy, D., Proc. of the 25th Anniversary Meeting of EMAG (Inst. Physics, London, 1971), p. 306.Google Scholar
9Vale, S., Inst. Phys. Ser. No. 78, Chap. 3, 79 (1985).Google Scholar
10Venables, J. A. and Harland, C. J., Philos. Mag. A 27, 1193 (1973).CrossRefGoogle Scholar
11Dingley, D. J., Scanning Electron Microscopy 2, 569 (1984).Google Scholar
12Wright, S. I. and Adams, B. L., Metall. Trans. A 23, 759 (1992).CrossRefGoogle Scholar
13Juul Jensen, D. and Schmidt, N. H., Textures and Microstructures, 14–18, 97 (1991).CrossRefGoogle Scholar
14Bennett, B. W. and Pickering, H. W., Scripta Metall. 18, 743 (1984).CrossRefGoogle Scholar
15Michael, J. R. and Goehner, R. P., MSA Bulletin 23, 168 (1993).Google Scholar
16Dingley, D. J. and Randle, V., J. Mater. Sci. 27, 4545 (1992).CrossRefGoogle Scholar
17Image (Version 1.45) by W. Rasband, NIH, Bethesda, MD; an image capture, processing, and manipulation program.Google Scholar
18Dingley, D. J. and Baba-Kishi, K., Scanning Electron Microscopy 2, 383 (1986).Google Scholar
19Brandon, D. G., Acta Metall. 14, 1479 (1966).CrossRefGoogle Scholar
20Garbacz, A. and Grabski, M. W., Scripta Metall. 23, 1369 (1989).CrossRefGoogle Scholar
21Murr, L. E., Interfacial Phenomena in Metals and Alloys (Addison-Wesley Publishing Company, Reading, MA, 1975), p. 145.Google Scholar
22Randle, V. and Brown, A., Philos. Mag. A 59, 1075 (1989).CrossRefGoogle Scholar