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Determination of the thickness of titanium films on glass substrate by nanoindentation tests

  • Tao Wen (a1), Jianghong Gong (a2), Zhijian Peng (a3), Danyu Jiang (a4), Chengbiao Wang (a5), Zhiqiang Fu (a5) and Hezhuo Miao (a6)...

Abstract

We reported a simple and convenient method to determine the film thickness by nanoindentation tests. This method starts from the analysis of the unloading portion of the measured nanoindentation load-displacement curves according to a quadratic polynomial, P = α(hhf)2P0, where P is the indentation load, P0 is the virtual load used to consider the effect of the residual contact stress, h is the indenter displacement (penetration depth), hf is the final displacement after complete unloading which should be determined by curve fitting, and α is a constant. Then the best-fit value of the parameter P0 is plotted as a function of the maximum penetration depth, hmax. Such a P0 versus hmax curve may pass through a minimum, and hmax corresponding to this minimum would be equal to the film thickness value.

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Corresponding author

a)Address all correspondence to this author. e-mail: pengzhijian@cugb.edu.cn

References

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Keywords

Determination of the thickness of titanium films on glass substrate by nanoindentation tests

  • Tao Wen (a1), Jianghong Gong (a2), Zhijian Peng (a3), Danyu Jiang (a4), Chengbiao Wang (a5), Zhiqiang Fu (a5) and Hezhuo Miao (a6)...

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