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Deposition of nitrides and oxides of aluminum and titanium by pulse laser irradiation

  • S.R. Nishitani (a1), S. Yoshimura (a1), H. Kawata (a1) and M. Yamaguchi (a1)


Deposits of nitrides and oxides of Al and Ti have been produced by laser irradiation of Al and Ti targets in air, N2, and NH3 + N2 gases. Microstructure and constituent phases in these deposits have been examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and x-ray diffractometry (XRD). The distribution of metalloid elements has been investigated by Rutherford backscattering spectrometry (RBS). On the basis of the results of these examinations, the nitride and oxide deposits have been shown to be formed by reactions between ambient gas and metal-melt or metal-vapor which take place during pulse laser irradiation.



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1.Biunno, N., Narayan, J., Hofmeister, S. K., Srivatsa, A. R., and Singh, R. K., Appl. Phys. Lett. 54, 1519 (1989).
2.Auciello, O., Barnes, T., Chevacharoenkul, S., Schreiner, A. F., and McGuire, G. E., Thin Solid Films 181, 65 (1989).
3.Rykalin, N.N., Uglov, A. A., Grebennikov, V.A., and Ignat'ev, M.B., Sov. Phys. Dokl. 28, 895 (1983).
4.Scheive, H-J. and Siemroth, R., IEEE Trans. Plasma Sci. 18, 917 (1990).
5.Nishitani, . S.R., Yamaoka, H., and Yamaguchi, M., Jpn. J. Appl. Phys. 29, 2477 (1990).
6.Chan, S-W., Dijkkamp, D., Wu, X.D., Venkatesan, T., and Chang, C.C., in Beam-Solid Interactions and Transient Processes, edited by Thompson, M. O., Picraux, S. T., and Williams, J. S. (Mater. Res. Soc. Symp. Proc. 74, Pittsburgh, PA, 1987), p. 287.
7.Ogale, S. B., Polman, A., Quentin, F. O. P., Roorda, S., and Saris, F. W., Appl. Phys. Lett. 50, 138 (1987).
8.Matsunawa, A. and Katayama, S., Laser Welding, Machining and Materials Processing, Proceedings of the International Conference on Applications of Lasers and Electro-Optics-ICALEO ‘85,edited by Albright, C. (Springer-Verlag, New York, 1986), p. 205.
9.Ursu, I., Mihailescu, I.N., Nistor, L. C., Popa, Al, Popescu, M., Teodorescu, V. S., Nanu, L., Prokhorov, A. M., Konov, V. I., Tokarev, V. N., and Uglov, S.A., J. Phys. D 18, 1693 (1985).
10.Craciun, V., Leggieri, G., Luches, A., Martino, M., Mihailescu, I. N., and Ursu, I., Appl. Surf. Sci. 43, 304 (1989).
11. Joint Committee of Powder Diffraction Spectra: TiN (osbornite), File No. 6–0642, and Ti (hexagonal), File No. 5–0682.
12.Lippens, B.C. and deBoer, J.H., Acta Cryst. 17, 1312 (1964).
13.Wicks, C. E. and Block, F. E., Thermodynamic Properties of 65 ElementsTheir Oxides, Halides, Carbides and Nitrides, Bureau of Mines, U. S. Depart, of Interior, Bulletin 605 (1963).

Deposition of nitrides and oxides of aluminum and titanium by pulse laser irradiation

  • S.R. Nishitani (a1), S. Yoshimura (a1), H. Kawata (a1) and M. Yamaguchi (a1)


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