Hostname: page-component-77c89778f8-vpsfw Total loading time: 0 Render date: 2024-07-17T06:55:10.769Z Has data issue: false hasContentIssue false

Deposition of diamond phase carbon films on surface pretreated stainless steel substrate

Published online by Cambridge University Press:  03 March 2011

Ebrahim Heidarpour
Affiliation:
Department of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology, Nakamachi, Koganei, Tokyo 184, Japan
Yoshikatsu Namba
Affiliation:
Department of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology, Nakamachi, Koganei, Tokyo 184, Japan
Get access

Abstract

The deposition of diamond phase carbon films on stainless steel substrates by an ionized deposition technique has been studied. A molybdenum grid used during argon ion sputtering had a decisive role in improving the morphology and adhesion ability of the substrate surface. The chemical composition of the surface was obtained by x-ray photoelectron spectroscopy, indicating the reduction of oxygen, carbon, and other contamination, while the surface morphology of the substrate obtained by scanning electron microscopy showed less roughness with a partially smooth surface. Attempts to extract the deposited films from the pretreated substrate surface by a superadhesive agent with an adhesion of 250 kg/cm2 failed, yielding a much stronger adhesion for the pretreated surface. This fact was also supported by examining the surface morphology, hardness, and the resistivity of the films deposited on the same substrates. As for the crystal structure of diamond phase carbon films on stainless steel, selected area diffraction patterns obtained from transmission electron microscopy suggested a mixture of amorphous carbon and polycrystalline diamond components.

Type
Articles
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Aisenberg, S. and Chabot, R., J. Appl. Phys. 42 (7), 2953 (1971).CrossRefGoogle Scholar
2Holland, L. and Ojha, S. M., Thin Solid Films 38, L17 (1976).CrossRefGoogle Scholar
3Moravec, T. J. and Orent, T. W., J. Vac. Sci. Technol. 18 (2), 226 (1981).CrossRefGoogle Scholar
4Bubenzer, A., Dischler, B., Brandt, G., and Koidl, P., J. Appl. Phys. 54 (8), 4590 (1983).CrossRefGoogle Scholar
5Namba, Y. and Mori, T., J. Vac. Sci. Technol. A 3 (2), 319 (1985).CrossRefGoogle Scholar
6Vitkavage, D. J., Rudder, R. A., Fountain, G. G., and Markunas, R. J., J. Vac. Sci. Technol. A 6, 1812 (1988).CrossRefGoogle Scholar
7Zou, J. W., Schmidt, K., Reichely, K., and Dischler, B., J. Appl. Phys. 67, 487 (1990).CrossRefGoogle Scholar
8Cho, N. H., Veirs, D. K., Ager, J. W. III, Rubin, M. D., and Hopper, C. B., J. Appl. Phys. 71, 2243 (1992).CrossRefGoogle Scholar
9Ingram, D. C., Fifth Int. Conf. on Surface Modification Technology, Birmingham, U. K. (1991).Google Scholar
10Ham, M. and Lou, K. A., J. Vac. Sci. Technol. A 8 (3), 2143 (1990).CrossRefGoogle Scholar
11Morotta, E., Bakhru, N., Gill, A., Patel, V., and Meyerson, B., Thin Solid Films 206, 188 (1991).CrossRefGoogle Scholar
12Heidarpour, E. and Namba, Y., Surf. Coat. Technol. 49, 394 (1991).CrossRefGoogle Scholar
13Namba, Y., Heidarpour, E., and Nakayama, M., J. Appl. Phys. 72, 1748 (1992).CrossRefGoogle Scholar
14Mori, T. and Namba, Y., J. Vac. Sci. Technol. A 1, 23 (1983).CrossRefGoogle Scholar
15Mckenzie, D. R., McPhedran, R. C., Botten, L. C., Savvides, N., and Netterfield, R. P., Appl. Opt. 21, 3615 (1982).CrossRefGoogle Scholar
16Gaskell, P. H., Saeed, A., Chieux, P., and Mckenzie, D. R., Phys. Rev. Lett. 67, 1286 (1991).CrossRefGoogle Scholar