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Characterization of pulsed laser deposited MoS2 by transmission electron microscopy

Published online by Cambridge University Press:  03 March 2011

S.D. Walek ,
M.S. Donley ,
J.S. Zabinski  and
V.J. Dyhouse
S.D. Walek
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
M.S. Donley
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
J.S. Zabinski
Affiliation:
WL/MLBT, Materials Directorate, Wright-Patterson Air Force Base, Ohio 45433-6533
V.J. Dyhouse
Affiliation:
Research Institute, University of Dayton, Dayton, Ohio 45469-0168
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Abstract

Molybdenum disulfide is a technologically important solid phase lubricant for vacuum and aerospace applications. Pulsed laser deposition of MoS2 is a novel method for producing fully dense, stoichiometric thin films and is a promising technique for controlling the crystallographic orientation of the films. Transmission electron microscopy (TEM) of self-supporting thin films and cross-sectional TEM samples was used to study the crystallography and microstructure of pulsed laser deposited films of MoS2. Films deposited at room temperature were found to be amorphous. Films deposited at 300 °C were nanocrystalline and had the basal planes oriented predominately parallel to the substrate within the first 12–15 nm of the substrate with an abrupt upturn into a perpendicular (edge) orientation farther from the substrate. Spherically shaped particles incorporated in the films from the PLD process were found to be single crystalline, randomly oriented, and less than about 0.1 μm in diameter. A few of these particles, observed in cross section, had flattened bottoms, indicating that they were molten when they arrived at the surface of the growing film. Analytical electron microscopy (AEM) was used to study the chemistry of the films. The x-ray microanalysis results showed that the films have the stoichiometry of cleaved single crystal MoS2 standards.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 11 , November 1993 , pp. 2933 - 2941
Copyright
Copyright © Materials Research Society 1993

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