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Carbon films from polyacrylonitrile

Published online by Cambridge University Press:  31 January 2011

C. L. Renschler
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87115
A. P. Sylwester
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87115
L. V. Salgado
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87115
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Abstract

Polyacrylonitrile (PAN) films have been fabricated by both spin and solvent casting techniques, and pyrolyzed to produce carbon films in the thickness range of 200–50000 Å. These films have higher electrical conductivities than carbon films produced from most other precursors at similar temperatures. The chemical structure of the films at different stages of processing was investigated by UV, IR, Raman, and XPS spectroscopies. An extra degree of control over the final electrical conductivity was obtained by varying the PAN content of copolymer precursors. Oxidation rates and an activation energy were determined. Finally, processing techniques are described which allow both dry and wet film transfer and lithographic patterning.

Type
Articles
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1Morgan, M., Thin Solid Films 7 (5), 313 (1971).CrossRefGoogle Scholar
2Hauser, J.J., Solid State Commun. 17, 1577 (1975).CrossRefGoogle Scholar
3Anderson, D.A., Philos. Mag. 35, 17 (1977).CrossRefGoogle Scholar
4Ohdaira, H., Suzuki, H., and Saito, M., Int. J. for Hybrid Microelectronics 6 (1), 276 (1983).Google Scholar
5Murakami, M., Watanabe, K., and Yoshimura, S., Appl. Phys. Lett. 48 (23), 1594 (1986).CrossRefGoogle Scholar
6Smits, F.M., Bell System Tech. J., May 1985, p. 711.Google Scholar
7Bailey, J. E. and Clarke, A. J., Nature 234, 529 (1971).Google Scholar
8Takahagi, T., Shimada, I., Fukuhara, M., Morita, K., and Ishitani, A., J. Polym. Sci: Polym. Chem. 24, 3101 (1986).Google Scholar
9Stevenson, W. T. K., Garton, A., Ripmeester, J. A., and Wiles, D. M., Polym. Deg. Stab. 15, 125 (1986).Google Scholar
10Chung, T.-C., Schlesinger, Y., Etamad, S., MacDiarmid, A. G., and Heeger, A. J., J. Polym. Sci: Polym. Phys. 22, 1239 (1984).Google Scholar
11Zhang, J.M. and Eklund, P.C., J. Mater. Res. 2 (6), 858 (1987).Google Scholar
12Rouzand, J. N., Oberlin, A., and Beny-Bassey, C., Thin Solid Films 105, 75 (1983).CrossRefGoogle Scholar
13Dannenburg, E. M., in Encyclopedia of Composite Materials and Components, edited by Grayson, Martin (John Wiley and Sons, New York, 1983), pp. 230265.Google Scholar
14Donnet, J.-B. and Bansal, A. C., Carbon Fibers (Marcel Dekker, New York, 1984), p. 94.Google Scholar
15Lyons, A.M., Hale, L. P., and Wilkins, C. W. Jr, J. Vac. Sci. Technol. B. 3 (1), 447 (1985).CrossRefGoogle Scholar
16McKee, D. W., Carbon 25 (4), 551 (1987).CrossRefGoogle Scholar
17Walker, P. L. Jr, Rusinko, F. Jr, and Austin, L. G., Adv. in Catalysis 11, 164 (1959).Google Scholar
18Sylwester, A.P., Aubert, J.H., Rand, P. B., Arnold, C. Jr, and Clough, R.L., Am. Chem. Soc. PMSE Preprint 57, 113 (1987).Google Scholar