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Microstructure and mechanical properties of Ti–Si–N coatings

Published online by Cambridge University Press:  31 January 2011

W. J. Meng ,
X. D. Zhang ,
B. Shi ,
R. C. Tittsworth ,
L. E. Rehn  and
P. M. Baldo
W. J. Meng
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
X. D. Zhang
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
B. Shi
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
R. C. Tittsworth
Affiliation:
Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, Louisiana 70803
L. E. Rehn
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
P. M. Baldo
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
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Abstract

A series of Ti–Si–N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti–Si–N coatings consists of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothly with the Si composition.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 10 , October 2002 , pp. 2628 - 2632
Copyright
Copyright © Materials Research Society 2002

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