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Microstructure and mechanical properties of Ti–Si–N coatings

Published online by Cambridge University Press:  31 January 2011

W. J. Meng
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
X. D. Zhang
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
B. Shi
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
R. C. Tittsworth
Affiliation:
Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, Louisiana 70803
L. E. Rehn
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
P. M. Baldo
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
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Abstract

A series of Ti–Si–N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti–Si–N coatings consists of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothly with the Si composition.

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Copyright
Copyright © Materials Research Society 2002

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