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Charge State Distribution Measurement in an ECR-Discharge by VUV-Spectroscopy
Published online by Cambridge University Press: 12 April 2016
Extract
The charge state distribution of multiply charged Ar ions in an electron cyclotron resonance (ECR) heated microwave discharge (Bernhardi et al. 1976) was measured by means of VUV-spectroscopy in the wavelength region λ ≤ 100 nm (Marlinghaus 1984). Ion densities were computed from absolute line intensities in a modified corona model. Assuming electron impact excitation of groundstate ions to play the major role and neglecting all other processes leading to excitation, the ion density nz is given by
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- Session 6. Poster Papers
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- Copyright © Naval Research Laboratory 1984. Publication courtesy of the Naval Research Laboratory, Washington, DC.